Deposition of Coatings Based on Boron Carbide by the Gas-Phase Method
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We present the results of investigation of the production of boron carbide by the method of hydrogen reduction of boron trichloride BCl3 in a vapor of toluene C7H8. The thermodynamics and kinetic features of the deposition of boron carbides in the BCl3–C7H8–H2 system are investigated.
Keywordsboron carbide hydrogen reduction thermodynamics kinetics of deposition
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