Preparations and tribological properties of soft-metal/DLC composite coatings by RF magnetron sputter using composite targets
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This work reports the characteristics and tribological properties of both Ag/DLC nanocomposite coatings (RF-Ag-DLC) and Cu/DLC nanocomposite coatings (RF-Cu-DLC) with hydrogen-free DLC matrix deposited by RF magnetron sputtering using a concentric composite target (CCT). The CCT consisted of a C base target and metal tablet, and the tablet was located on the center of the base target concentrically where the etching rate by Ar ions is extremely low. By changing the diameter of Ag or Cu tablets in CCT, RF-Ag-DLC with an Ag concentration ranging from 6 to 65 at.% and RF-Cu-DLC with Cu concentration ranging from 7 to 75 at.% can be prepared. These coatings show a granular structure having Ag or Cu nano-crystals with a diameter ranging from 5 to 10 nm dispersed homogeneously in the hydrogen-free DLC matrix. The friction coefficient of DLC varied depending on the species and content of metal. The transition of the friction coefficient became stable when metal-rich tribofilms formed on the counterfaces.
KeywordsSoft metal DLC Nanocomposite RF magnetron sputter Tribology
This work was partly supported by a Grant-in-Aid for Scientific Research (S) (25220902), (C) (26420093) of the Japan Society for the Promotion of Science (JSPS) and Collaborative Research Project (J14038 and J15018) of the Institute of Fluid Science of Tohoku University. The author expresses his gratitude to Dr. J. CHOI of Tokyo University for his support of Raman analysis. The author gratefully acknowledges Mr. M. Oda and Mr. T. Nawata among the students of National Institute of Technology, Ube College for their generous assistance with the coating preparations.
- Eckstein, W.: Max-Planck-Institute fur Plasmaphysik, IPP Report, IPP9/132 (2002)Google Scholar
- Goto, M., Nakahara, T., Honda, F.: Morphological effect of epitaxial Ag films with thickness of the order of nanometers on the tribological properties of a single-crystal silicon surface in an ultra-high-vacuum environment. Proc. Inst. Mech. Eng. Part J: J. Eng. Tribol. 218(4): 279–291 (2004)Google Scholar
- Goto, M., Akimoto, K., Honda, F., Nakahara, T.: Tribo-assisted reorientation of nanometer-thick Ag film in ultrahigh vacuum environment, Proc. Inst. Mech. Eng. Part J: J. Eng. Tribol. 220(3): 135–142 (2006)Google Scholar
- Kato, D., Kato, M., Murakami, I., Kato, T., Eckstein, W.: NIFS database on sputtering, reflection and range values. http://dpc.nifs.ac.jp/DB/Eckstein/ (2003)
- Koma, A., Yagi, K., Tsukada, M., Aono, M.: Handbook of Surface Science and Technology. Maruzen Co., Ltd (1987). (in Japanese) Google Scholar
- The Japan Institute of Metals and Materials: Metal Data Handbook. Maruzen Co., Ltd (1974). (in Japanese) Google Scholar