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Journal of Sol-Gel Science and Technology

, Volume 66, Issue 1, pp 120–125 | Cite as

Microstructure and performance of AZO thin films prepared by sol–gel processing

  • Rainer Jahn
  • Peer LöbmannEmail author
Original Paper

Abstract

Al-doped zinc oxide (AZO) films were prepared by a wet-chemical coating technique, their microstructure and crystal growth were characterized as a function of the single layer thickness. When similar final thicknesses are attained by more multiple subsequent coating-firing cycles, film porosity is reduced from over 14 to 2 %. Simultaneously the AZO crystallite size is increased from approximately 23 to 60 nm, a preferential c-axis oriented growth is observed. Different substrates (soda-lime glass, soda-lime glass with a SiO2 barrier coating, borosilicate glass and alkali-free display glass) were used and the resulting AZO films were compared. It is found that the substrate composition primarily affects grain growth and subsequently the electrical performance of the AZO films.

Keywords

Thin film AZO TCO Ellipsometric porosimetry Substrate 

Notes

Acknowledgments

The authors are indebted to Angelika Schmitt for the EP measurements. Hall measurements were performed at Fraunhofer IST in Braunschweig, Germany, by Christina Schulz.

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Copyright information

© Springer Science+Business Media New York 2013

Authors and Affiliations

  1. 1.Fraunhofer-Institut für SilicatforschungWürzburgGermany

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