Journal of Sol-Gel Science and Technology

, Volume 60, Issue 3, pp 395–399 | Cite as

Hybrid solgel Bragg grating loaded waveguide by soft-lithography and its potential use as optical sensor

  • P. ProspositoEmail author
  • C. Palazzesi
  • F. Michelotti
  • V. Foglietti
  • M. Casalboni
Original Paper


Preliminary tests on the sensibility to external environment of an optical waveguide filter operating in the near infrared region are reported. Device consists of a hybrid sol–gel based grating loaded channel waveguide. Several techniques were implemented to obtain the final device. A hard master with gratings produced by Electron Beam Lithography was employed to fabricate a transparent soft mold. UV-nanoimprinting technique, exploiting the soft stamp, was used to reproduce on the hybrid photosensitive sol–gel film the planar grating. Optical lithography was finally applied to manufacture the grating loaded channel waveguide which is our final integrated sensor. The device was optically characterized by transmission measurements in the range 1,450–1,590 nm and its sensibility to external environment was tested in air and water.


Hybrid sol–gel material Bragg grating Optical sensor UV-nanoimprinting Waveguide Photosensitive material 



The authors are deeply indebted to Dr. Federica Stella and Dr. Glauco Stracci for their experienced technical assistance during the lithographic processes and for AFM characterization. This work was supported in part by the Italian CARIPLO foundation through the project number 2010-0525.


  1. 1.
    Narayanaswamy R (2006) Acta Biologica Szegediensis 50:105–108Google Scholar
  2. 2.
    Adrian J, Pasche S, Diserens JM, Sanchez-Baeza F, Gao H, Marco MP, Voirin G (2009) Biosens Bioelectron 24:3340–3346CrossRefGoogle Scholar
  3. 3.
    Jeong C, Shin C, Kim D, Chae J, Kim Y (2010) Trans Electr Electron Mater 11:77–80CrossRefGoogle Scholar
  4. 4.
    Gracheva IE, Maksimov AI, Moshnikov VA, Plekh ME (2008) Instrum Exp Tech 51:462–465CrossRefGoogle Scholar
  5. 5.
    McDonagh C, Burke CS, MacCraith BD (2008) Chem Rev 108:400–422CrossRefGoogle Scholar
  6. 6.
    Mukundan H, Anderson AS, Grace WK, Grace KM, Hartman N, Martinez JS, Swanson BI (2009) Sensors 9:5783–5809CrossRefGoogle Scholar
  7. 7.
    Liang W, Huang Y, Xu Y, Lee RK, Yariv A (2005) Appl Phys Lett 86:151122_1-151122_3Google Scholar
  8. 8.
    Tiefenthaler K, Lukosz W (1989) J Opt Soc Am B 6:209–220CrossRefGoogle Scholar
  9. 9.
    Hill KO, Meltz G (1997) J Light Technol 15:1263–1276CrossRefGoogle Scholar
  10. 10.
    Sparrow IJG, Smith PGR, Emmerson GD, Watts SP, Riziotis C (2009) Planar Bragg grating sensors-fabrication and applications: a review. J Sens. doi: 10.1155/2009/607647
  11. 11.
    Xu LN, Fanguy JC, Soni K, Tao SQ (2004) Opt Lett 29:1191–1193CrossRefGoogle Scholar
  12. 12.
    Ai L, Liu WF, Fu MY, Chen TC (2009) Microw Opt Technol 51:40–42CrossRefGoogle Scholar
  13. 13.
    Davies E, Viitala R, Salomaki M, Areva S, Zhang L, Bennion I (2009) J Opt A Pure Appl Opt 11:015501CrossRefGoogle Scholar
  14. 14.
    Gu ZT, Xu YP, Gao K (2006) Opt Lett 31:2405–2407CrossRefGoogle Scholar
  15. 15.
    Fang Y (2010) Resonant waveguide grating biosensor for microarrays. In: Zouroub M, Lakhtakia A (eds) Optical guided-wave chemical and biosensors II. Springer-Verlag, Berlin, Heidelberg. doi: 10.1007/978-3-642-02827-4_2
  16. 16.
    Le Guével X, Palazzesi C, Prosposito P, Della Giustina G, Brusatin G (2008) J Mater Chem 18:3556–3562CrossRefGoogle Scholar
  17. 17.
    Prosposito P, Casalboni M, Orsini E, Palazzesi C, Stella F (2010) Solid State Sci 12:1886–1889CrossRefGoogle Scholar
  18. 18.
    Sotomayor Torres CM (2003) Alternative lithography: unleashing the potentials of nanotechnology. Kluwer Academic/Plemun Publishers, New YorkGoogle Scholar
  19. 19.
    Li Z, Gu Y, Wang L, Ge H, Wu W, Xia Q, Yuan C, Chen Y, Cui B, Williams RS (2009) Nano Lett 9:2306–2310CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • P. Prosposito
    • 1
    Email author
  • C. Palazzesi
    • 1
  • F. Michelotti
    • 2
  • V. Foglietti
    • 3
  • M. Casalboni
    • 1
  1. 1.Department of PhysicsUniversity of Rome Tor Vergata and INSTMRomeItaly
  2. 2.SAPIENZA Università di Roma - Dipartimento di Scienze di Base ed Applicate per l’IngegneriaRomeItaly
  3. 3.CNR-IFN, Institute for Photonics and NanotechnologiesRomeItaly

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