Hybrid solgel Bragg grating loaded waveguide by soft-lithography and its potential use as optical sensor
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Preliminary tests on the sensibility to external environment of an optical waveguide filter operating in the near infrared region are reported. Device consists of a hybrid sol–gel based grating loaded channel waveguide. Several techniques were implemented to obtain the final device. A hard master with gratings produced by Electron Beam Lithography was employed to fabricate a transparent soft mold. UV-nanoimprinting technique, exploiting the soft stamp, was used to reproduce on the hybrid photosensitive sol–gel film the planar grating. Optical lithography was finally applied to manufacture the grating loaded channel waveguide which is our final integrated sensor. The device was optically characterized by transmission measurements in the range 1,450–1,590 nm and its sensibility to external environment was tested in air and water.
KeywordsHybrid sol–gel material Bragg grating Optical sensor UV-nanoimprinting Waveguide Photosensitive material
The authors are deeply indebted to Dr. Federica Stella and Dr. Glauco Stracci for their experienced technical assistance during the lithographic processes and for AFM characterization. This work was supported in part by the Italian CARIPLO foundation through the project number 2010-0525.
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