High Precision Diamond Machining of Hybrid Sol-Gel Coatings
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Flexible and economic production of complex reflective optical elements is achieved by high-precision machining of aluminum and copper with diamond tools. There is also an increasing demand for complex refractive optical elements like micro lens arrays, Fresnel lenses or prismatic surfaces on silicon wafers or metallic surfaces. For the production of these optical elements, hybrid sol-gel coatings based on methacryloxypropyltrimethoxysilane (MATMS) and zirconium (IV) tetra n-propoxide (ZTP) were deposited on aluminum substrates by spin-coating. The influence of the rotational velocity and the chemical sol composition on the coating thickness was determined. The hardness and elastic modulus of these coatings was measured as a function of the chemical composition. The machining characteristics of these coatings were investigated by high precision turning and fly cutting with diamond tools of different geometry. The resulting surface finish obtained was determined as a function of the machining parameters.
Keywordshybrid sol-gel coating spin coating diamond machining nanoindentation
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