Journal of Sol-Gel Science and Technology

, Volume 32, Issue 1–3, pp 107–110 | Cite as

Ordered Mesostructured Silica Films: Effect of Pore Surface on its Sensing Properties

  • P. Falcaro
  • J. Mio Bertolo
  • P. Innocenzi
  • Heinz Amenitsch
  • A. Bearzotti

Abstract

An electrochemical resistive-type sensor device, with a mesoporous silica thin film as sensitive membrane, has been developed and characterised. The silica film has been obtained via evaporation-induced self-assembly (EISA) using a tri-block copolymer (Pluronic F-127) as templating agent. It has been deposited by dip-coating on a silicon substrate with metallic interdigitated electrodes. Fast, reversible and reproducible electrical responses to relative humidity changes have been observed for the sensor device. The conduction mechanism has been related to chemical properties, structural order and surface morphology of the porosity in the silica film, confirming the dependence on the film preparation method and overall the importance of calcination temperature.

Keywords

self-assembling mesostructured materials thin film Grotthus conduction humidity sensor 

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Copyright information

© Kluwer Academic Publishers 2004

Authors and Affiliations

  • P. Falcaro
    • 1
  • J. Mio Bertolo
    • 2
  • P. Innocenzi
    • 3
  • Heinz Amenitsch
    • 4
  • A. Bearzotti
    • 5
  1. 1.Dipartimento di Ingegneria Meccanica, Settore MaterialiUniversità di PadovaPadovaItaly
  2. 2.IMM-CNR Sez. di RomaArea di Ricerca di Roma “Tor Vergata”RomeItaly
  3. 3.Dipartimento di Architettura e Pianificazione, Laboratorio di Scienza dei materiali e NanotecnologieUniversità di SassariAlgheroItaly
  4. 4.Institute of Biophysics and X-ray Structure ResearchAustrian Academy of SciencesGrazAustria
  5. 5.IMM-CNR Sez. di RomaArea di Ricerca di Roma “Tor Vergata”RomeItaly

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