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Journal of Polymer Research

, 25:192 | Cite as

Photo-sensitive bio-based copolymer containing cholic acids: novel functional materials for 248nm photoresist

  • Changwei Ji
  • Jingcheng Liu
  • Xiangfei Zheng
  • Ren Liu
  • Yan Yuan
  • Xiaoya Liu
  • Qidao Mu
ORIGINAL PAPER

Abstract

Cholic acid is a class of biological compounds that exhibit valuable properties, and have been applied in many fields due to its special chemical structures for many areas. In this study, poly[(methacrylic acid tert-butyl cholate ester)-co-(acetoxy styrene)] [P(MATC-co-AS)] was synthesized from cholic acid, then the final copolymer poly[(methacrylic acid tert-butyl cholate ester)-co-(p-hydrostyrene)] [P(MATC-co-HS)] was obtained after P(MATC-co-AS) was hydrolysized. The structure and properties of the copolymers were determined through nuclear magnetic resonance, gel permeation chromatography, UV spectrometry, thermogravimetric analysis, and differential scanning calorimetry. The ultraviolet spectra of the copolymers indicate that they exhibit excellent optical transmittance at 248 nm. Moreover, the photolithography performance of a positive-tone photoresist based on the copolymers were evaluated using an KrF laser exposure system. The results indicate that a resolution of 0.25 μm could be achieved at a low exposure dose.

Keywords

Bio-based Cholic acid Photoresist Resolution 

Notes

Acknowledgements

This work has been financially supported by the Fundamental Research Funds for the Central Universities (No.JUSRP51719A), the China Postdoctoral Foundation Project (No.2016M601712), and Postgraduate Research & Practice Innovation Program of Jiangsu Provence (No.KYCX217-1434, No.SJCX18_0619). Very thanks for Suzhou Rui Hong Electronic Chemicals Co., Ltd. and 13th Research Institute of China Electronics Technology Group Corporation for the Lithographic evaluations.

Supplementary material

10965_2018_1584_MOESM1_ESM.doc (1.2 mb)
ESM 1 (DOC 1179 kb)

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Copyright information

© Springer Nature B.V. 2018

Authors and Affiliations

  • Changwei Ji
    • 1
    • 2
  • Jingcheng Liu
    • 1
    • 2
  • Xiangfei Zheng
    • 1
    • 2
  • Ren Liu
    • 1
    • 2
  • Yan Yuan
    • 1
    • 2
  • Xiaoya Liu
    • 1
    • 2
  • Qidao Mu
    • 3
  1. 1.The Key Laboratory of synthestic and biological Colloids, Ministry of Education, School of Chemical and Material EngineeringJiangnan UniversityWuxiChina
  2. 2.International Research Centre for Photo responsible Functional Molecules & MaterialsJiangnan UniversityWuxiChina
  3. 3.Suzhou Rui Hong Electronic Chemicals Co., Ltd.SuzhouChina

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