Journal of Russian Laser Research

, Volume 30, Issue 1, pp 21–33 | Cite as

Plasma-driven instability of quasi-lamb elastic modes as a mechanism of laser-induced micropatterning of a silicon surface with a silicon dioxide cap

  • Vladimir I. Emel’yanov
  • Dmitry M. Seval’nev


A model of the electron–hole plasma-driven instability of quasi-Lamb elastic modes in semiconductors with a dioxide cap is developed and applied to the description of laser-induced micropatterning of the semiconductor surface. A good correspondence of the theoretical and experimental results is obtained.


silicon with silicon dioxide cap laser pulsed irradiation micropatterning of surface plasmainduced instability of static quasi-Lamb modes 


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Copyright information

© Springer Science+Business Media, Inc. 2009

Authors and Affiliations

  • Vladimir I. Emel’yanov
    • 1
  • Dmitry M. Seval’nev
    • 1
  1. 1.Faculty of PhysicsM. V. Lomonosov Moscow State UniversityMoscowRussia

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