Journal of Russian Laser Research

, Volume 30, Issue 1, pp 21–33 | Cite as

Plasma-driven instability of quasi-lamb elastic modes as a mechanism of laser-induced micropatterning of a silicon surface with a silicon dioxide cap

  • Vladimir I. Emel’yanov
  • Dmitry M. Seval’nev
Article

Abstract

A model of the electron–hole plasma-driven instability of quasi-Lamb elastic modes in semiconductors with a dioxide cap is developed and applied to the description of laser-induced micropatterning of the semiconductor surface. A good correspondence of the theoretical and experimental results is obtained.

Keywords

silicon with silicon dioxide cap laser pulsed irradiation micropatterning of surface plasmainduced instability of static quasi-Lamb modes 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J. J. Yu, J. Y. Zhang, I. W. Boyd, and Y. F. Lu, Appl. Phys. A, 72, 35 (2001).CrossRefADSGoogle Scholar
  2. 2.
    V. I. Emel’yanov and A. V. Rogacheva, Quantum Electron., 28, 991 (1998).CrossRefGoogle Scholar
  3. 3.
    V. I. Emel’yanov, Laser Phys., 18, 682 (2008).CrossRefADSGoogle Scholar
  4. 4.
    I. A. Viktorov, Rayleigh and Lamb Waves: Physical Theory and Applications, Plenum Press, New York (1967).Google Scholar
  5. 5.
    L. C. Kimerling, Solid State Commun., 21, 1391 (1978).Google Scholar
  6. 6.
    H. Sumi, Phys. Rev. B, 29, 4616 (1984).CrossRefADSGoogle Scholar
  7. 7.
    L. D. Landau and E. M. Lifshits, Theory of Elasticity, Pergamon Press, Oxford (1986).Google Scholar
  8. 8.
    V. I. Emel’yanov, Laser Phys., 18, 1435 (2008).CrossRefADSGoogle Scholar

Copyright information

© Springer Science+Business Media, Inc. 2009

Authors and Affiliations

  • Vladimir I. Emel’yanov
    • 1
  • Dmitry M. Seval’nev
    • 1
  1. 1.Faculty of PhysicsM. V. Lomonosov Moscow State UniversityMoscowRussia

Personalised recommendations