Plasma-driven instability of quasi-lamb elastic modes as a mechanism of laser-induced micropatterning of a silicon surface with a silicon dioxide cap
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A model of the electron–hole plasma-driven instability of quasi-Lamb elastic modes in semiconductors with a dioxide cap is developed and applied to the description of laser-induced micropatterning of the semiconductor surface. A good correspondence of the theoretical and experimental results is obtained.
Keywordssilicon with silicon dioxide cap laser pulsed irradiation micropatterning of surface plasmainduced instability of static quasi-Lamb modes
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- 4.I. A. Viktorov, Rayleigh and Lamb Waves: Physical Theory and Applications, Plenum Press, New York (1967).Google Scholar
- 5.L. C. Kimerling, Solid State Commun., 21, 1391 (1978).Google Scholar
- 7.L. D. Landau and E. M. Lifshits, Theory of Elasticity, Pergamon Press, Oxford (1986).Google Scholar