Electro-optical Characterization of Superconducting Nanowire Single-Photon Detectors Fabricated on 3C Silicon Carbide

  • F. MartiniEmail author
  • A. Gaggero
  • F. Mattioli
  • R. Leoni


Silicon carbide (SiC) is a promising candidate as a material platform for photonic quantum technologies due to the coexistence of quantum emitters and a non-centrosymmetric crystal structure. The realization of a single-photon detector was hampered from both the poor surface quality and the difficulties in micromachining this material. In this work, we realized superconducting nanowire single-photon detectors (SNSPDs) integrated on top of high-quality 3C SiC whose electro-optical characterization was performed thanks to a novel alignment method. We demonstrate that SNSPDs with high internal efficiency can be fabricated which is a fundamental building block toward the realization of complex architectures in this platform.


SNSPD SiC Quantum photonics 



This work was financially supported by the Project H2020-MSCA-IF-2017, No. 795923, SHAMROCK “Superconductive MiR phOton Counter.”


  1. 1.
    J.L. O’Brien, A. Furusawa, J. Vučković, Photonic quantum technologies. Nat. Photon. 3, 687–695 (2009)ADSCrossRefGoogle Scholar
  2. 2.
    M. Davanco, J. Liu, L. Sapienza, C.-Z. Zhang, J.V. De Miranda Cardoso, V. Verma, R. Mirin, S.W. Nam, L. Liu, K. Srinivasan, Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices. Nat. Commun. 8, 889 (2017)ADSCrossRefGoogle Scholar
  3. 3.
    A.W. Elshaari, E. Büyüközer, I.E. Zadeh, T. Lettner, P. Zhao, E. Schöll, S. Gyger, M.E. Reimer, D. Dalacu, P.J. Poole, K.D. Jöns, V. Zwiller, Strain-tunable quantum integrated photonics. Nano Lett. 18, 7969–7976 (2018)ADSCrossRefGoogle Scholar
  4. 4.
    D.J. Christle, A.L. Falk, P. Andrich, P.V. Klimov, J. ul Hassan, N.T. Son, E. Janzén, T. Ohshima, D.D. Awschalom, Isolated electron spins in silicon carbide with millisecond coherence times. Nat. Mater. 14, 160–163 (2014)ADSCrossRefGoogle Scholar
  5. 5.
    D.J. Christle, P.V. Klimov, C.F. de las Casas, K. Szász, V. Ivády, V. Jokubavicius, J. Ul Hassan, M. Syväjärvi, W.F. Koehl, T. Ohshima, N.T. Son, E. Janzén, Á. Gali, D.D. Awschalom, Isolated spin qubits in SiC with a high-fidelity infrared spin-to-photon interface. Phys. Rev. X 7, 021046 (2017)Google Scholar
  6. 6.
    W.F. Koehl, B.B. Buckley, F.J. Heremans, G. Calusine, D.D. Awschalom, Room temperature coherent control of defect spin qubits in silicon carbide. Nature 479, 84–87 (2011)ADSCrossRefGoogle Scholar
  7. 7.
    A.L. Falk, B.B. Buckley, G. Calusine, W.F. Koehl, V.V. Dobrovitski, A. Politi, C.A. Zorman, P.X.-L. Feng, D.D. Awschalom, Polytype control of spin qubits in silicon carbide. Nat. Commun. 4, 1819 (2013)ADSCrossRefGoogle Scholar
  8. 8.
    I. Chatzopoulos, F. Martini, R. Cernansky, A. Politi, High-Q/V photonic crystal cavities and QED analysis in 3C-SiC. ACS Photon. 6, 1826–1831 (2019)CrossRefGoogle Scholar
  9. 9.
    G. Calusine, A. Politi, D.D. Awschalom, Cavity-enhanced measurements of defect spins in silicon carbide. Phys. Rev. Appl. 6, 14019 (2016)ADSCrossRefGoogle Scholar
  10. 10.
    F. Martini, A. Politi, Linear integrated optics in 3C silicon carbide. Opt. Express 25, 10735–10742 (2017)ADSCrossRefGoogle Scholar
  11. 11.
    F. Martini, A. Politi, Four wave mixing in 3C SiC ring resonators. Appl. Phys. Lett. 112, 251110 (2018)ADSCrossRefGoogle Scholar
  12. 12.
    T. Fan, H. Moradinejad, X. Wu, A.A. Eftekhar, A. Adibi, High-Q integrated photonic microresonators on 3C-SiC-on-insulator (SiCOI) platform. Opt. Express 26, 25814 (2018)ADSCrossRefGoogle Scholar
  13. 13.
    F. Marsili, V.B. Verma, J.A. Stern, S. Harrington, A.E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M.D. Shaw, R.P. Mirin, S.W. Nam, Detecting single infrared photons with 93% system efficiency. Nat. Photon. 7, 210–214 (2013)ADSCrossRefGoogle Scholar
  14. 14.
    W.H.P. Pernice, C. Schuck, O. Minaeva, M. Li, G.N. Goltsman, A.V. Sergienko, H.X. Tang, High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits. Nat. Commun. 3, 1325 (2012)ADSCrossRefGoogle Scholar
  15. 15.
    A. Gaggero, S.J. Nejad, F. Marsili, F. Mattioli, R. Leoni, D. Bitauld, D. Sahin, G.J. Hamhuis, R. Nötzel, R. Sanjines, A. Fiore, Nanowire superconducting single-photon detectors on GaAs for integrated quantum photonic applications. Appl. Phys. Lett. 97, 151108 (2010)ADSCrossRefGoogle Scholar
  16. 16.
    P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, W. Pernice, Superconducting single-photon detectors integrated with diamond nanophotonic circuits. Light Sci. Appl. 4, e338–e338 (2015)ADSCrossRefGoogle Scholar
  17. 17.
    A. Gaggero, F. Martini, F. Mattioli, F. Chiarello, R. Cernansky, A. Politi, R. Leoni, Amplitude-multiplexed readout of single photon detectors based on superconducting nanowires. Optica 6, 823 (2019)ADSCrossRefGoogle Scholar
  18. 18.
    J.R. Gao, M. Hajenius, F.D. Tichelaar, T.M. Klapwijk, B. Voronov, E. Grishin, G. Gol’Tsman, C.A. Zorman, M. Mehregany, Monocrystalline NbN nanofilms on a 3C-SiCSi substrate. Appl. Phys. Lett. 91, 3–6 (2007)Google Scholar
  19. 19.
    A.J. Miller, A.E. Lita, B. Calkins, I. Vayshenker, S.M. Gruber, S.W. Nam, Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent. Opt. Express 19, 9102 (2011)ADSCrossRefGoogle Scholar
  20. 20.
    M. Ejrnaes, A. Casaburi, O. Quaranta, S. Marchetti, A. Gaggero, F. Mattioli, R. Leoni, S. Pagano, R. Cristiano, Characterization of parallel superconducting nanowire single photon detectors. Supercond. Sci. Technol. 22, 55006–55007 (2009)ADSCrossRefGoogle Scholar
  21. 21.
    F. Martini, A. Gaggero, F. Mattioli, R. Leoni, Single photon detection with superconducting nanowires on crystalline silicon carbide. Opt. Express 27, 29669 (2019)ADSCrossRefGoogle Scholar

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© Springer Science+Business Media, LLC, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Istituto di Fotonica e Nanotecnologie - CNRRomeItaly

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