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Measurement of Optical Constants of TiN and TiN/Ti/TiN Multilayer Films for Microwave Kinetic Inductance Photon-Number-Resolving Detectors

  • M. Dai
  • W. Guo
  • X. Liu
  • M. Zhang
  • Y. Wang
  • L. F. WeiEmail author
  • G. C. Hilton
  • J. Hubmayr
  • J. Ullom
  • J. Gao
  • M. R. Vissers
Article
  • 22 Downloads

Abstract

We deposit thin titanium nitride (TiN) and TiN/Ti/TiN multilayer films on sapphire substrates and measure the reflectance and transmittance in the wavelength range from 400 to 2000 nm using a spectrophotometer. The optical constants (complex refractive indices), including the refractive index n and the extinction coefficient k, have been derived. With the extracted refractive indices, we propose an optical stack structure using low-loss amorphous Si (a-Si) anti-reflective coating and a backside aluminum (Al) reflecting mirror, which can in theory achieve 100% photon absorption at 1550 nm. The proposed optical design shows great promise in enhancing the optical efficiency of TiN-based microwave kinetic inductance photon-number-resolving detectors.

Keywords

Optical constants Refractive index TiN Microwave kinetic inductance detectors 

Notes

Acknowledgements

The TiN films were deposited in the NIST-Boulder micro-fabrication facility. We thank Dr. Adriana. E. Lita for useful discussions. This work was supported in part by the National Natural Science Foundation of China (Grant Nos. 61871333, 61301031, U1330201).

References

  1. 1.
    P.A. Hiskett, D. Rosenberg, C.G. Peterson, R.J. Hughes, S. Nam, A. Lita, A. Miller, J. Nordholt, New J. Phys. 8(9), 193 (2006)ADSCrossRefGoogle Scholar
  2. 2.
    E. Knill, R. Laflamme, G.J. Milburn, Nature 409(6816), 46–52 (2001)ADSCrossRefGoogle Scholar
  3. 3.
    M. Giustina, A. Mech, S. Ramelow, B. Wittmann, J. Kofler, J. Beyer, A. Lita, B. Calkins, T. Gerrits, S.W. Nam et al., Nature 497(7448), 227–230 (2013)ADSCrossRefGoogle Scholar
  4. 4.
    J.C. Zwinkels, E. Ikonen, N.P. Fox, G. Ulm, M.L. Rastello, Metrologia 47(5), R15 (2010)ADSCrossRefGoogle Scholar
  5. 5.
    A.J. Miller, S.W. Nam, J.M. Martinis, A.V. Sergienko, Appl. Phys. Lett. 83(4), 791–793 (2003)ADSCrossRefGoogle Scholar
  6. 6.
    A.E. Lita, A.J. Miller, S.W. Nam, Opt. Express 16(5), 3032–3040 (2008)ADSCrossRefGoogle Scholar
  7. 7.
    A.E. Lita, B. Calkins, L.A. Pellouchoud, A.J. Miller, S. Nam, Proc. SPIE 7681, 76810D (2010)ADSCrossRefGoogle Scholar
  8. 8.
    B. Calkins, P.L. Mennea, A.E. Lita, B.J. Metcalf, W.S. Kolthammer, A. Lamas-Linares, J.B. Spring, P.C. Humphreys, R.P. Mirin, J.C. Gates et al., Opt. Express 21(19), 22657–22670 (2013)ADSCrossRefGoogle Scholar
  9. 9.
    L. Lolli, E. Taralli, M. Rajteri, J. Low Temp. Phys. 167(5–6), 803–808 (2012)ADSCrossRefGoogle Scholar
  10. 10.
    G. Brida, L. Ciavarella, I.P. Degiovanni, M. Genovese, L. Lolli, M.G. Mingolla, F. Piacentini, M. Rajteri, E. Taralli, M.G. Paris, New J. Phys. 14(8), 085001 (2012)ADSCrossRefGoogle Scholar
  11. 11.
    L. Lolli, E. Taralli, C. Portesi, E. Monticone, M. Rajteri, Appl. Phys. Lett. 103(4), 041107 (2013)ADSCrossRefGoogle Scholar
  12. 12.
    P.K. Day, H.G. LeDuc, B.A. Mazin, A. Vayonakis, J. Zmuidzinas, Nature 425(6960), 817–821 (2003)ADSCrossRefGoogle Scholar
  13. 13.
    J. Gao, M.R. Vissers, M.O. Sandberg, F.C.S. da Silva, S.W. Nam, D.P. Pappas, D.S. Wisbey, E.C. Langman, S.R. Meeker, B.A. Mazin, H.G. Leduc, J. Zmuidzinas, K.D. Irwin, Appl. Phys. Lett. 101(14), 142602 (2012).  https://doi.org/10.1063/1.4756916 ADSCrossRefGoogle Scholar
  14. 14.
    W. Guo, X. Liu, Y. Wang, Q. Wei, L.F. Wei, J. Hubmayr, J. Fowler, J. Ullom, L. Vale, M.R. Vissers, J. Gao, Appl. Phys. Lett. 110(21), 212601 (2017).  https://doi.org/10.1063/1.4984134 ADSCrossRefGoogle Scholar
  15. 15.
    J.E. Nestell, R.W. Christy, Appl. Opt. 11(3), 643–651 (1972).  https://doi.org/10.1364/AO.11.000643 ADSCrossRefGoogle Scholar
  16. 16.
    M.R. Vissers, J. Gao, D.S. Wisbey, D.A. Hite, C.C. Tsuei, A.D. Corcoles, M. Steffen, D.P. Pappas, Appl. Phys. Lett. 97(23), 232509 (2010).  https://doi.org/10.1063/1.3517252 ADSCrossRefGoogle Scholar
  17. 17.
    M.R. Vissers, J. Gao, M. Sandberg, S.M. Duff, D.S. Wisbey, K.D. Irwin, D.P. Pappas, Appl. Phys. Lett. 102(23), 232603 (2013).  https://doi.org/10.1063/1.4804286 ADSCrossRefGoogle Scholar
  18. 18.
  19. 19.
    D. Rosenberg, S. Nam, A. Miller, A. Salminen, E. Grossman, R. Schwall, J. Martinis, Nuclear instruments and methods in physics research section A: accelerators. Spectrom. Detect. Assoc. Equip. 520(1), 537–540 (2004)CrossRefGoogle Scholar
  20. 20.
    E. Valkonen, C.-G. Ribbing, J.-E. Sundgren, Appl. Opt. 25(20), 3624–3630 (1986).  https://doi.org/10.1364/AO.25.003624 ADSCrossRefGoogle Scholar
  21. 21.
    B. Karlsson, J.-E. Sundgren, B.-O. Johansson, Thin Solid Films 87(2), 181–187 (1982)ADSCrossRefGoogle Scholar
  22. 22.
    D. Smith, E. Shiles, M. Inokuti, E. Palik, Handb. Opt. Constants Solids 1, 369–406 (1985)CrossRefGoogle Scholar
  23. 23.
    J.M. Martinis, K.B. Cooper, R. McDermott, M. Steffen, M. Ansmann, K. Osborn, K. Cicak, S. Oh, D.P. Pappas, R.W. Simmonds et al., Phys. Rev. Lett. 95(21), 210503 (2005)ADSCrossRefGoogle Scholar
  24. 24.
    M. Dressel, Adv. Condens. Matter Phys. 2013, 104379 (2013)CrossRefGoogle Scholar
  25. 25.
    F. Pfuner, L. Degiorgi, T. Baturina, V. Vinokur, M. Baklanov, New J. Phys. 11(11), 113017 (2009)ADSCrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  • M. Dai
    • 1
  • W. Guo
    • 2
  • X. Liu
    • 3
  • M. Zhang
    • 3
  • Y. Wang
    • 3
  • L. F. Wei
    • 1
    Email author
  • G. C. Hilton
    • 2
  • J. Hubmayr
    • 2
  • J. Ullom
    • 2
  • J. Gao
    • 2
  • M. R. Vissers
    • 2
  1. 1.Information Quantum Technology Laboratory, School of Information Science and TechnologySouthwest Jiaotong UniversityChengduChina
  2. 2.National Institute of Standards and TechnologyBoulderUSA
  3. 3.Quantum Optoelectronics Laboratory, School of Physical Science and TechnologySouthwest Jiaotong UniversityChengduChina

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