Study of Surface Roughness Effect on Super–Normal Transition of Ti/Au Transition Edge Sensor Calorimeters
We are developing transition edge sensor (TES) X-ray microcalorimeters for the future Japanese mission DIOS. It adopts microstrip readout wiring for low pixel-to-pixel crosstalk. In past samples, TES films composed of Ti and Au have not shown proper super–normal transition when it is deposited on the wiring. Assuming that surface roughness of the substrate can influence the transition, we reduced the surface roughness of the underneath layer before deposition of the TES film by using chemical mechanical polishing. We then found that the substrate becomes much smoother with a roughness of <1 nm rms and the TES film shows a proper transition.