Fabrication of Ultrasensitive TES Bolometric Detectors for HIRMES
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The high-resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R ~ 100,000) instrument operating in the 25–122 μm spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy in 2019. Central to HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8 × 16 detector high-resolution array and a 64 × 16 detector low-resolution array. Both types of detectors consist of Mo/Au TES fabricated on leg-isolated Si membranes. Whereas the high-resolution detectors, with a noise equivalent power (NEP) ~ 1.5 × 10−18 W/rt (Hz), are fabricated on 0.45 μm Si substrates, the low-resolution detectors, with NEP ~ 1.0 × 10−17 W/rt (Hz), are fabricated on 1.40 μm Si. Here, we discuss the similarities and differences in the fabrication methodologies used to realize the two types of detectors.
KeywordsTransition edge sensor HIRMES Bolometer
This work was supported by a SOFIA Third Generation Instrument Award. The authors gratefully acknowledge suggestions from Kevin Denis, and support from James Chervenak for cryogenic testing of the Mo/Au bilayers.
Funding was provided by National Aeronautics and Space Administration (Grant No. NNH15ZCA001N-S3GSI).
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