Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices
We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Qs and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.
KeywordsDynamics Micro/nano-mechanics Resonance modes
We would like to thank B. Fernandez, T. Fournier, C. Blanc and O. Bourgeois for help with the fabrication of the devices, and M. Nũnez-Regueiro for financially supporting the ANSYS project via ANR grant TetraFer ANR-09-BLAN-0211. We acknowledge the support from MICROKELVIN, the EU FRP7 low temperature infrastructure grant 228464, and of the 2010 ANR French grant QNM No. 0404 01.
- 8.ANSYS®, Multiphysics engineering calculation platform Google Scholar
- 11.Wolfram Research, Structural mathematics. Torsional analysis. Online: http://reference.wolfram.com/applications/structural/TorsionalAnalysis.html