Stressed Silicon Nitride Nanomechanical Resonators at Helium Temperatures
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We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104. We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.
KeywordsNanomechanical resonators Nonlinear Magnetomotive
We would like to thank G. Julie, E. Andre and T. Fournier for help with the fabrication of the devices. We acknowledge the support from MICROKELVIN, the EU FRP7 low temperature infrastructure grant 228464, and of the 2010 ANR French grant QNM n∘ 040401.