Journal of Low Temperature Physics

, Volume 167, Issue 5–6, pp 809–814 | Cite as

Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

  • K. Il’in
  • M. Hofherr
  • D. Rall
  • M. Siegel
  • A. Semenov
  • A. Engel
  • K. Inderbitzin
  • A. Aeschbacher
  • A. Schilling
Article

Abstract

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature TC=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

Keywords

TaN Superconducting thin films Superconducting detectors 

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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • K. Il’in
    • 1
  • M. Hofherr
    • 1
  • D. Rall
    • 1
  • M. Siegel
    • 1
  • A. Semenov
    • 2
  • A. Engel
    • 3
  • K. Inderbitzin
    • 3
  • A. Aeschbacher
    • 3
  • A. Schilling
    • 3
  1. 1.Institut für Mikro- und Nanoelektronische SystemeKarlsruher Institut für TechnologieKarlsruheDeutschland
  2. 2.DLR Institute for Planetary ResearchBerlinDeutschland
  3. 3.Physik-Institut der Universität ZürichZürichSchweiz

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