A Fabrication Process for Microstrip-Coupled Superconducting Transition Edge Sensors Giving Highly Reproducible Device Characteristics
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Abstract
Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.
Keywords
Transition edge sensors Superconducting microstrip Submillimeter-wave detectorsPACS
07.57.Kp 81.15.C 85.25.Oj 85.40.HpPreview
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References
- 1.M. Griffin, Nucl. Instrum. Methods Phys. Res. A. 444, 397 (2000) CrossRefADSGoogle Scholar
- 2.K.D. Irwin, Appl. Phys. Lett. 66(15), 1998 (1995) CrossRefADSGoogle Scholar
- 3.M.D. Audley et al., in Proc. 17th International Symposium on Space Terahertz Technology, Paris (2006). (ArXiv:astro-ph/0608285) Google Scholar
- 4.G.C. Hilton et al., IEEE Trans. Appl. Supercond. 11, 739 (2001) CrossRefGoogle Scholar
- 5.L. Dunlop, D.M. Glowacka, D.J. Goldie, S. Withington, G. Yassin, Proc. SPIE 6275, 27507 (2006) Google Scholar
- 6.J.M. Martinis, G.C. Hilton, K.D. Irwin, D.A. Wollman, Nucl. Instrum. Methods A 444, 23 (2000) CrossRefADSGoogle Scholar