Skip to main content

Advertisement

SpringerLink
Log in

Evolution of Structural, Morphological, Mechanical and Optical properties of TiAlN coatings by Variation of N and Al amount

  • Published:
Journal of Inorganic and Organometallic Polymers and Materials Aims and scope Submit manuscript

Abstract

TiAlN thin films deposited on silicon and glass substrates using a reactive DC magnetron sputtering system with different mixture volume of pure nitrogen and argon gases. Phase formation, phase transition, elemental composition, hardness and optical properties are mostly affected by the nitrogen amount in reactive gas. The concentration of Al causes large effects to both the intensity of X ray diffraction and the position of preferred growth orientation. Depending on the Al content, the films either have a single phase cubic TiAlN structure or consist of a mixture of cubic TiN and hexagonal AlN phases with a decrease in the degree of crystallinity. With increasing N2 amount, the amorphous films with a denser and smoother microstructure similar to the zone T structure developed. AFM results indicated that an increase in Al content resulted in an increase of surface roughness. Experimental data indicates that the hardness is affected not only by microstructure but also by the existence of Al content. The UV–Vis absorbance and transmittance spectra depend on N content. We have also found that the films prepared at lower nitrogen amount have high optical transparent at UV range. The absorption spectra exhibit redshift characteristic with increasing particle size.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. G. Su, Z. Liu, Wear characteristics of nano TiAlN-coated carbide tools in ultrahigh speed machining of AerMet100. Wear 289, 124–131 (2012)

    Article  CAS  Google Scholar 

  2. C. Gnoth, C. Kunze, M. Hans, J. Emmerlich, J.M. Schneider, G. Grundmeier, Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering. J. Phys. D. 46, 084003 (2013)

  3. K. Chakrabarti, J.J. Jeong, S.K. Hwang, Y.C. Yoo, C.M. Lee, Effects of nitrogen flow rates on the growth morphology of TiAlN films prepared by an rf-reactive sputtering technique. Thin Solid Films 406, 159–163 (2002)

    Article  CAS  Google Scholar 

  4. H.C. Barshilia, B. Deepthi, K.S. Rajam, Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering. Vacuum 81, 479–488 (2006)

    Article  CAS  Google Scholar 

  5. Y.C. Chan, H.W. Chen, P.S. Chao, J.G. Duh, J.W. Lee, Microstructure control in TiAlN/SiNx multilayers with appropriate thickness ratios for improvement of hardness and anti-corrosion characteristics. Vacuum 87, 195–199 (2013)

    Article  CAS  Google Scholar 

  6. J.T. Chen, J. Wang, F. Zhang, X.Y. Fan, Z.G. Wu, P.X. Yan, Characterization and temperature controlling property of TiAlN coatings deposited by reactive magnetron co-sputtering. J. Alloys Compd. 472, 91–96 (2009)

    Article  CAS  Google Scholar 

  7. K. Abu-Shgair, M. Al-Hasan, A.A. Jawwad, A. Al-Bashir, H.H. Abu-Safe, M.H. Gordon, Characterizing (Ti,Al)n film coating produced by inverted cylindrical magnetron sputteringfor metal machining applications. Rev. Adv. Mater. 24, 48–55 (2010)

    Google Scholar 

  8. Z. Wu, Z. Gong, C. Feng, A. Guo, An emergent mechanism of selective visual attention in Drosophila. Biol. Cybern. 82(1), 61–68 (2000)

    Article  CAS  Google Scholar 

  9. L. García-González, M.G. Garnica-Romo, J. Hernández-Torres, F.J. Espinoza-Beltrán, A study of TiAlN coatings prepared by rf co-sputtering. Braz. J. Chem. Eng. 24, 249 (2007)

    Article  Google Scholar 

  10. W. Ting, H. Hwang, J. Lee, D.L. Kwong, Growth kinetics of ultrathin SiO2 films fabricated by Rapid Thermal Oxidation of Si substrates in N2O. J. Appl. Phys. 70, 1072–1074 (1991)

    Article  CAS  Google Scholar 

  11. D.G. Park, T.H. Cha, S.H. Lee, I.S. Yeo, Characteristics of sputtered Ti1–xAlxN films for storage node electrode barriers”. J. Vac. Sci. Technol. 19(6), 2289 (2001)

    Article  CAS  Google Scholar 

  12. H.C. Barshilia, N. Selvakumar, K.S. Rajam, D.V.S. Rao, K. Muraleedharan, A. Biswas, TiAlN/TiAlON/Si3N4 tandem absorber for high temperature solar selective applications. Appl. Phys. Lett. 89, 191909 (2006)

    Article  Google Scholar 

  13. A. Biswas, D. Bhattacharyys, H.C. Barshilia, N. Selvakumar, K.S. Tajam, Spectroscopic ellipsometric characterization of TiAlN/TiAlON/Si3N4 tandem absorber for solar selective applications. Appl. Surf. Sci. 254, 1694 (2008)

    Article  CAS  Google Scholar 

  14. H.C. Barshilia, N. Selvakumar, K.S. Rajam, A. Biswas, Optical properties and thermal stability of TiAlN/AlON tandem absorber prepared by re active DC/RF magnetron sputtering. Sol. Energy Mater. Sol. Cells 92, 1425 (2008)

    Article  CAS  Google Scholar 

  15. A. Schuler, V. Thommen, P. Reimann, P. Oelhafen, G. Francz, T. Zehnder, M. Duggelin, D. Mathys, R. Guggenheim, Structural and optical properties of titanium aluminum nitride films (Ti1–xAlxN). J. Vac. Sci. Technol. A 19(3), 922–929 (2001)

    Article  CAS  Google Scholar 

  16. V. Godinho, D. Philippon, T.C. Rojas, N.N. Novikova, V.A. Yakovlev, E.A. Vinogradov, A. Fernandez, Characterization of Ti1_xAlxN coatings with selective IR reflectivity. Sol. Energy 84, 1397–1401 (2010)

    Article  CAS  Google Scholar 

  17. He Yudan, Jiangshan Luo, Li Kai, Bingchi Luo, Jiqiang Zhang, Hongbu Yin, Wu Weidong, Influence of CH4–Ar ratios on the composition, microstructure and optical properties of Be2C films synthesized by DC reactive magnetron sputtering. RSC Adv 45, 39444 (2016)

    Google Scholar 

  18. M. Bilokur, A. Gentle, M. Arnold, M.B. Cortie G.B. Smith, Optical properties of refractory TiN, AlN and (Ti,Al)N coatings. SPIE Micro + Nano Mater. Dev. Syst. 9668, 96685O–1 (2015)

    Google Scholar 

  19. B. Subramanian, R. Ananthakumar, M. Jayachandran, Microstructural, mechanical and electrochemical corrosion properties of sputtered titanium-aluminum-nitride films for bio-implants. Vacuum 85, 601 (2010)

    Article  CAS  Google Scholar 

  20. K.H. Chunga, G.T. Liub, J.G. Duhb, J.H. Wang, Biocompatibility of a titanium–aluminum nitride film coating on a dental alloy. Surf. Coat. Technol. 188–189, 745–749 (2004)

    Article  Google Scholar 

  21. Caixian Tang, PhD thesis, Industrial Research Institute Swinburne (IRIS) Swinburne University of Technology Hawthorn, Victoria Australia (2007)

  22. N. Saoula, S. Djerourou, K. Yahiaoui, K. Henda, R. Kesri, R.M. Erasmus, J.D. Comins, Study of the deposition of Ti/TiN multilayers by magnetron sputtering. Surf. Inter. Anal. 42, 1176–1179 (2010)

    Article  CAS  Google Scholar 

  23. C. Damasio, P. Defilippis, C. Draper, D. Wild, Thermal design and thermal verification tests of the Solar Orbiter Heat Shield STM, 45th International Conference on Environmental Systems ICES – 2015-7612-1 6 July 2015, Bellevue, Washington

  24. D.M. Devia, E. Restrepo-Parra, P.J. Arango, A.P. Tschiptschin, J.M. Velez, TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage. Appl. Surf. Sci. 257, 6181–6185 (2011)

    Article  CAS  Google Scholar 

  25. R. Rachbauer, J.J. Gengler, A.A. Voevodin K. Resch, H. Paul, Mayrhofer, Temperature driven evolution of thermal, electrical, and optical properties of Ti–Al–N coatings. Acta Mater. 60, 2091–2096 (2012)

    Article  CAS  Google Scholar 

  26. J. Bujak, J. Walkowicz, J. Kusinski, Influence of the nitrogen pressure on the structure and properties of (Ti,Al)N coatings deposited by cathodic vacuum arc PVD process. Surf. Coat. Technol. 180, 150 (2004)

    Article  Google Scholar 

  27. K. Chakrabarti, J.J. Jeong, S.K. Hwang, Y.C. Yoo, C.M. Lee, Effects of nitrogen flow rates on the growth morphology of TiAlN films prepared by an rf-reactive sputtering technique. Thin Solid Films 406, 159 (2002)

    Article  CAS  Google Scholar 

  28. J.H. Hsieh, C. Liang, W. Wu, C.H. Yu, Deposition and characterization of TiAlN and multi-layered TiN/TiAlN coatings using unbalanced magnetron sputtering. Surf. Coat. Technol. 132, 108–109 (1998)

    Google Scholar 

  29. A. Knutsson, Structural characterization of arc evaporated TiAlN/TiN multilayers, MASTER’S THESIS.

  30. I.V. Zolotukhin, E.K. Yu, Amorphous, metallic alloys. Sov. Phys. Uspekhi 33, 720 (1990)

    Article  Google Scholar 

  31. H. Huang, Z. Lin, M. Wang, C. Xi, Microstructural and mechanical properties of TiAlN and Ti3AlN films deposited by reactive magnetron sputtering. Mater. Sci. Forum 816, 283–288 (2015)

    Article  Google Scholar 

  32. J.E. Greene, J.E. Sundgren, L. Hultman, I. Petrov, D.B. Bergstrom, Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering. Appl. Phys. Lett. 67, 2928 (1995)

    Article  CAS  Google Scholar 

  33. P. Patsalas, C. Gravalidis, S. Logothetidis, Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films. J. Appl. Phys 96, 6234 (2004)

    Article  CAS  Google Scholar 

  34. M. Marlo, V. Milman, Density-functional study of bulk and surface properties of titanium nitride using different exchange-correlation functionals, Phys. Rev. B 62, 2899 (2000)

    Article  CAS  Google Scholar 

  35. C. Mendibide, P. Steyer, J. Fontaine, P. Goudeau, Improvement of the tribological behavior of PVD nanostratified TiN/CrN coatings—An explanation. J. Surf. Coat. Technol. 201(7), 4119–4124 (2006)

    Article  CAS  Google Scholar 

  36. C. Hsu, M. Chen, K. Lai, Corrosion resistance of TiN/TiAlN-coated ADI by cathodic arc deposition, Mater. Sci. Eng. A 421 (2006) 182–190

    Article  Google Scholar 

  37. Yong-qiang Wei, L.I. Chun-wei, G. Chun-zhi, X.B. Tian, S.Q. Yang, Microstructure and mechanical properties of TiN/TiAlN multilayer coatings deposited by arc ion plating with separate targets. Trans. Nonferrous Met. Soc. China 21, 1068–1073 (2011)

    Article  CAS  Google Scholar 

  38. M. Pinkas, J. Pelleg, M.P. Dariel, Structural analysis of (Ti1–xAlx)N graded coatings deposited by reactive magnetron sputtering. Thin Solid Films 355, 380–384 (1999)

    Article  Google Scholar 

  39. J.R. Roos, J.P. Celis, E. Vancoille et al., Interrelationship between processing, coating properties and functional properties of steered arc physically vapor deposited (Ti, Al)N and (Ti, Al)N and (Ti, Nb)N coatings. Thin Solid Films 194, 547–556 (1990)

    Article  Google Scholar 

  40. S. Paldey, S.C. Deevi, Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review. Mater. Sci. Eng. A 342, 58–79 (2003)

    Article  Google Scholar 

  41. K. Wasa, I. Kanno, H. Kotera, Handbook of Sputter Deposition Technology, 2nd edn. ( Elsevier, Oxford 2012)

    Google Scholar 

  42. J.H. Hsieh, C. Liang, C.H. Yu, W. Wu, Deposition and characterization of TiAlN and multi-layered TiN/TiAlN coatings using unbalanced magnetron sputtering. Surf. Coat. Technol. 108, 132 (1998)

    Article  Google Scholar 

  43. B.-Y. Shew, J.-L. Huang, D.-F. Lii, Thin Solid Films 293, 212–219 (1997)

    Article  CAS  Google Scholar 

  44. T. Reeswinkel, D.G. Sangiovanni, V. Chirita, L. Hultman, J.M. Schneider, Structure and mechanical properties of TiAlN–WNx thin films. Surf. Coat. Technol. 205, 4821–4827 (2011)

    Article  CAS  Google Scholar 

  45. J. Musil, H. Hrubý, Superhard nanocomposite Ti1–xAlxN films prepared by magnetron sputtering. Thin Solid Films 365, 104–109 (2000)

    Article  CAS  Google Scholar 

  46. X.Z. Ding, A.L. Tan, X.T. Zeng, C. Wang, T. Yue, C.Q. Sun, Corrosion resistance of CrAlN and TiAlN coatings deposited by lateral rotating cathode arc. Thin Solid Films, 516(16) (2007)

  47. L. Jakab-Farkas, S. Papp, D. Biró, Effect of N concentration on microstructure evolution of the nanostructured (Al, Ti, Si)N coatings prepared by d.c. reactive magnetron sputtering. Sci. Bull. Petr Maior Univ. Tirgu Mures 6, 173–178 (2009)

    Google Scholar 

  48. S.A. Hoseini, M.R. Hantehzadeh, P. Salavati Dezfooli, S.S. Dezfooli, S.N. Hoseini, Effect of O2 in O2/Ar gas mixture on morphological and optical properties of tio2 thin films deposited by dc cylindrical magnetron Sputtering. J. Fusion Energy, 32, 495 (2013)

    Article  Google Scholar 

  49. A.K. Singh, Neelam Kumari, S.K. Mukherjee & P.K. Barhai, Atomic force microscopy analysis of effect of rf/dc power ratio on the properties of co-sputtered Ti XAl1-xN thin films. IJRRAS 14(3), 603–611 (2013)

    Google Scholar 

  50. J.A. Thornton, Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings. J. Vac. Sci. Technol. 11, 666–670 (1974)

    Article  CAS  Google Scholar 

  51. J.C. Oliveira, A. Manaia, J.P. Dias, A. Cavaleiro, D Teer, S. Taylor, The structure and hardness of magnetron sputtered Ti–Al–N thin films with low N contents (<42 at.%). Surf. Coat. Technol 200, 6583–6587 (2006)

    Article  CAS  Google Scholar 

  52. Z. Zhou, W.M. Rainforth, Q. Luo, P.E. Hovsepian, J.J. Ojeda, M.E. Romero-Gonzalez, Wear and friction of TiAlN/VN coatings against Al2O3 in air at room and elevated temperatures. Acta Mater. 58, 2912–2925 (2010)

    Article  CAS  Google Scholar 

  53. J.Y. Kim, K. Cho, S.A. Ryu, S.Y. Kim, B.M. Weon, Crack formation and prevention in colloidal drops. Sci. Rep. 5, 13166 (2015)

    Article  CAS  Google Scholar 

  54. A.E. Romanov, G.E. Beltz, S. James, Speck, Drack formation in surface layers with strain gradients. Int. J. Mat. Res. (formerly Z. Metallked.) 98(8), 723–728 (2007)

    Article  CAS  Google Scholar 

  55. F. Ali, B.S. Park, J.S. Kwak, The impact of surface morphology on TiAlN film’s properties. J. Ceram. Process. Res. 14(4), 529–534 (2013)

    Google Scholar 

  56. Y.P. Purandare, A.P. Ehiasarian, P.E. Hovsepian, Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique. J. Vac. Sci. Technol. A 34, 041052 (2016)

    Article  Google Scholar 

  57. P. Vuoristo, K. Niemi, A. Makela, T. Mantyla, Abrasion and erosion wear resistance of Cr3C2-NiCr coatings prepared by plasma, detonation and high-velocity oxyfuel spraying, in Proceedings of the 7th National Thermal Spray Conference, Boston, Mass, USA, 1994, pp. 121–126

  58. X. Liu, F. Yuan, Y. Wei, Grain size effect on the hardness of nanocrystal measured by the nanosize indenter. Appl. Surf. Sci. 279, 159–166 (2013)

    Article  CAS  Google Scholar 

  59. A. Hörling, L. Hultman, M. Odén, J. Sjölén, L. Karlsson, Mechanical properties and machining performance of Ti 1−x Al x N-coated cutting tools. Surf. Coat. Technol. 191, 384 (2005)

    Article  Google Scholar 

  60. A. Fawad, S.P. Beom, S.K. Joon, The impact of surface morphology on TiAlN film’s properties. J. Ceram. Process. Res. 14(4), 529–534 (2013)

    Google Scholar 

  61. T. Ikeda, H. Satoh, Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating method. Thin Solid Films 195, 99–110 (1991)

    Article  CAS  Google Scholar 

  62. M. Wen, Q.N. Meng, W.X. Yu, W.T. Zheng, S.X. Mao, M.J. Hua, Growth, stress and hardness of reactively sputtered tungsten nitride thin films, Surf. Coat. Technol. 205, 1953–1961 (2010)

    Article  CAS  Google Scholar 

  63. Y.C. Chim, X.Z. Ding, X.T. Zeng, S. Zhang, Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc. Thin Solid Films 517, 4845–4849 (2009)

    Article  CAS  Google Scholar 

  64. Hall EO (1951) The deformation and ageing of mild steel: III discussion of results. Proc Phys Soc Lond Sect B 64, 747

    Article  Google Scholar 

  65. G.A. Malygin, Self-organization of dislocations and localizations of sliding in plastically deformed-crystals. Phys Solid State 37, 3 (1995)

    CAS  Google Scholar 

  66. A.G. Evans, J.P. Hirth, Deformation of nanoscale cermets. Scr Metall 26, 1675 (1992)

    Article  CAS  Google Scholar 

  67. S. Serio, M.E. Melo Jorge, M.J.P. Maneira, Y. Nunes, Structural, optical and electrical studies on magnetron sputtered ZnO:Al films. Mater. Chem. Phys 126, 73–81 (2011)

    Article  CAS  Google Scholar 

  68. A. Mhamdi, R. Dridi, A. Arfaoui, C. Awada, M. Karyaoui, I.A. Velasco-Davalos, A. Ruediger, M. Amlouk, Structural, surface morphology and optical properties of NiSnO3 thin films prepared using spray technique. Opt. Mater. 47, 386–390 (2015)

    Article  CAS  Google Scholar 

  69. S.K. Mandal, R.K. Roy, A.K. Pal, Effect of particle shape distribution on the surface plasmon resonance of Ag–SiO2 nanocomposite thin films. J. Phys. D 36, 261–265 (2003)

    Article  CAS  Google Scholar 

  70. U. Kreibig, M. Vollmer eds. Theoretical consideration, in: Optical Properties of Metal Clusters, vol. 25, (Springer, New York, 1995), pp. 13–201

  71. G. Varughese, V. Rini, S.P. Suraj, K.T. Usha, Andoptical studies of copperoxide nanostructures doped with lanthanumions characterisation. Adv. Mater. Sci. 14, (2014) 49–60

    Google Scholar 

  72. P. Gupta, M. Ramrakhiani, Influence of the particle size on the optical properties of CdSe nanoparticles. Open Nanosci. J. 3, 15–19 (2009)

    Article  CAS  Google Scholar 

  73. M. Johan, L. Chong, N. Hamizi, Preparation and stabilization of monodisperse colloidal gold by reduction with Monosodium Glutamate and poly (Methyl Methacrylate). Int. J. Electrochem. Sci. 7, 4567–4573 (2012)

    CAS  Google Scholar 

  74. O.P. Agnihotri, B.K. Gupta, Solar Selective Surfaces (Wiley, New York, 1981)

    Google Scholar 

Download references

Acknowledgements

The authors are indebted to plasma physic center for their support and help (XRD and AFM experiments).

Author information

Authors and Affiliations

  1. Department of Physics, West Tehran Branch, Islamic Azad University, Tehran, Iran

    S. Asgary

  2. Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

    M. Ghoranneviss & A. Mahmoodi

  3. Shahid Beheshti University of Medical Sciences, Tehran, Iran

    S. Zarein-dolab

Authors
  1. S. Asgary
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Ghoranneviss
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. Mahmoodi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. Zarein-dolab
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. Asgary.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Asgary, S., Ghoranneviss, M., Mahmoodi, A. et al. Evolution of Structural, Morphological, Mechanical and Optical properties of TiAlN coatings by Variation of N and Al amount. J Inorg Organomet Polym 28, 428–438 (2018). https://doi.org/10.1007/s10904-017-0603-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10904-017-0603-z

Keywords

Search

Navigation