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Journal of Dynamics and Differential Equations

, Volume 20, Issue 3, pp 609–641 | Cite as

Dynamics of a Canonical Electrostatic MEMS/NEMS System

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The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average applied voltage and dimensionless frequency of voltage variation are delineated such that periodic solutions exist. Parameter ranges where such solutions fail to exist are identified; this provides a dynamic analog to the static “pull-in” instability well known to MEMS/NEMS researchers.

Keywords

MEMS nanotechnology electrostatics periodic solutions saddle-node bifurcation shooting method 

Mathematics Subject Classification (1991)

34C15 34C60 70K40 
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Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  1. 1.Department of Mathematical SciencesUniversity of Alabama in HuntsvilleHuntsvilleUSA
  2. 2.Department of Mathematical SciencesUniversity of DelawareNewarkUSA

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