Structural characterization and electrical properties of Nd2O3 by sol–gel method

  • Ramazan Lok
  • Erhan BudakEmail author
  • Ercan Yilmaz


In the current study, Neodymium oxide (Nd2O3) was prepared by sol–gel method and deposited on P-type 〈100〉 silicon wafer. The chemical characterization of samples was done by Fourier transform infrared spectroscopy (FTIR), X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive spectra (EDS) and atomic force microscopy (AFM). Nd–O bond formation was proven by FTIR, also cubic- Nd2O3 (c-Nd2O3) phase was detected by XRD. According to EDS analysis, neodymium concentration was approximately 59.41% while oxygen concentration was calculated as 10.21%. The amount of excess oxygen was 9.45% was originated by cristobalite formation. In addition, electrical characterizations of Nd2O3/p-Si MOS capacitor was performed by capacitance–voltage (CV), conductance–voltage G/ωV measurements at different frequencies between 250 kHz and 1 MHz. The maximum value of measured capacitance–voltage (CV) and conductance–voltage (G/ωV) was increased with decreasing in the applied voltage frequencies and after series resistance (Rs) correction, the measured CV and G/ωV characteristics, G/ω behavior started to decrease with rising the frequencies. According to the observed frequency dispersion, the deposited Nd2O3 on P-type 〈100〉 silicon exhibits stable insulation property for future microelectronic applications.



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Authors and Affiliations

  1. 1.Department of Physics, Faculty of Art and ScienceBolu Abant Izzet Baysal UniversityBoluTurkey
  2. 2.Center for Nuclear Radiation Detector Research and ApplicationsBolu Abant Izzet Baysal UniversityBoluTurkey
  3. 3.Department of Chemistry, Faculty of Art and ScienceBolu Abant Izzet Baysal UniversityBoluTurkey

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