Study on preparation of LSTP thin film electrolyte by RF magnetron sputtering and electrical properties

  • Xiuyun Zhang
  • Yunyun ZhaoEmail author
  • Qia Ling
  • Guisheng Zhu
  • Xiujuan Zhou
  • Jianqiu Deng
  • Dongliang Yan
  • Laijun LiuEmail author
  • Huarui XuEmail author
  • Aibing Yu


Amorphous Li–Si–Ti–P–O (LSTP) thin film electrolyte was successfully prepared by radio frequency magnetron sputtering using Li1.4Si0.4Ti1.6 (PO4)3 powder targets and stainless steel sheet as substrate. The effects of sputtering power on the structure, morphology, ionic conductivity, and electronic conductivity of the LSTP thin film electrolyte were investigated. The results showed that the LSTP thin film electrolyte obtained with sputtering power kept at 160 W, displayed uniform particles compacted in arrangement, proper stoichiometric ratio to the powder target as well as sufficient Li-ion for diffusion. Hence, it held a considerable ionic conductivity of 4.12 × 10−6 S cm−1 and a high σion/σele ratio about 8 magnitudes, indicating that it can be used as film electrolyte in all-solid-state lithium batteries.



This work was financially supported by the Middle-aged and Young Teachers’ Basic Ability Promotion Project of Guangxi(2018KY0198), the Directors’ Fund of Guangxi Manufacturing Systems and Advanced Manufacturing Technology Laboratory (Grant No. 16-380-12-008Z), Guangxi Natural Science Foundation (Nos. 2017GXNSFBA198075), and Guangxi Key Laboratory of Information Materials Foundation (Grant No. 171036-Z).


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Authors and Affiliations

  1. 1.College of Materials Science and EngineeringGuilin University of TechnologyGuilinChina
  2. 2.School of Material Science and EngineeringGuilin University of Electronic TechnologyGuilinChina
  3. 3.Guangxi Key Laboratory of Information MaterialsGuilin University of Electronic TechnologyGuilinChina
  4. 4.Department of Chemical EngineeringMonash UniversityClaytonAustralia

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