Opto-electromagnetic properties of carbon-doped zinc-oxide prepared using electrically induced crystallization and ion implantation process for gas sensor application
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A double-layer carbon-doped zinc oxide (ZnO/C) film structure was prepared using electrically induced crystallization (EIC) diffusion. The bottom layer atoms (C) were doped into the ZnO crystal structure, inducing intrinsic ferromagnetic characteristics and enhancing optical and electrical properties. The ion implantation process for ZnO/C is discussed in terms of optical, electrical, and magnetic performance. The sensitivity and switching speed of ZnO/C for sensing a volatile gas (alcohol) are evaluated. The EIC process leads to better sensitivity compared to those obtained with annealing and the ion implantation process.
The authors acknowledge the support by the Materials Science and Engineering Department at National Cheng Kong University, the various instrument facilities in the department, and the reference of the lab predecessors’ research methods, as well as the assistance from and discussion with the advisor. This study was supported by a grant from the Ministry of Science and Technology, Taiwan (MOST 108-2221-E-006-140-MY3).
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