Low resistivity ohmic contacts on lightly doped n-type β-Ga2O3 using Mg/Au
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Mg/Au stacks were introduced to prepare ohmic contact at different annealing temperatures on Sn lightly doped β-Ga2O3. Linear current–voltage characteristics were realized when the annealing temperatures were 300, 400 and 500 °C. The transmission line measurements were used to extract the specific contact resistance (ρc) of the annealed samples. The ρc decreased as annealing temperature increased and a minimum ρc of 2.1 × 10−5 Ω cm2 was obtained for the sample annealed at 500 °C. However, the contact electrodes with the ρc of 1.3 × 10−4 Ω cm2 after annealing at 400 °C had better surface profile and stability. The ohmic contact mechanism and stability of electrodes were discussed in details.
This work was supported by national key R&D plan (Nos. 2016YFB0400600, 2016YFB0400601), national science foundation of china (Nos. 11675198, 11875097, 61574026, 61774072), Liaoning provincial natural science foundation of china (Nos. 201602453, 201602176), China Postdoctoral Science Foundation Funded Project (No. 2016M591434), The Dalian Science and Technology Innovation Fund (No. 2018J12GX060).
- 1.K. Chabak, A. Green, N. Moser, S. Tetlak, J. McCandless, K. Leedy, R. Fitch, A. Crespo, G. Jessen, IEEE Electron Device Lett. (2017)Google Scholar