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Journal of Materials Science: Materials in Electronics

, Volume 29, Issue 21, pp 18136–18143 | Cite as

Effect of deposition time on sputtered ZnO thin films and their gas sensing application

  • Sonik Bhatia
  • Neha Verma
  • Munish Aggarwal
Article
  • 22 Downloads

Abstract

Nowadays, advanced industrialization and population growth have led to increasing the environmental related issues. This paper reports the effect of deposition time on ZnO films deposited on to the glass substrate by using rf magnetron sputtering technique and their further use for gas sensing applications. Herein, deposition time is considered to be changed from 300 s, 800 s (S1, S2). The thickness of deposited films lies in the range of 130–180 nm. The synthesized films were characterized by various techniques in terms of structural, morphological, optical and gas sensing properties. The typical crystal size of ZnO films was found to be in the range of 15–27 nm. FESEM analysis revealed the growth of nanospheres was lies in the range of 80–120 nm. Fourier transform infrared spectroscopy confirmed the ZnO bonding located at a wavelength of 430 cm−1. The average optical transmittance of the film was about 90–95% in the visible range. The optical band gap of ZnO films was decreased from 3.31 to 3.29 eV. The detailed characterization study showed 800 s is an optimum deposition time for good optoelectronic properties. For gas sensing application, highest sensitivity was obtained at operating temperature of 205 °C. Prepared films have a quick response and fast recovery time in the range of 128 s and 163 s respectively. These response and recovery time characteristics were explained by valence ion mechanism.

Notes

Acknowledgements

Authors are grateful to U.G.C, New Delhi for providing financial assistance for carrying out this project (F. No. 42-770/2013). Thanks due to the Director, R.S.I.C, Panjab University Chandigarh for providing SEM, XRD facility and IKGPTU Kapurthala for Research Cooperation.

References

  1. 1.
    G. Singh, S.B. Shrivastava, D. Jain et al., Effect of indium doping on zinc oxide films prepared by chemical spray pyrolysis technique. Bull. Mater. Sci. 33, 581–587 (2011).  https://doi.org/10.1007/s12034-010-0089-6 CrossRefGoogle Scholar
  2. 2.
    Y.I. Alivov, Fabrication and characterization of n -ZnO Õ p-AlGaN heterojunction light-emitting diodes on 6H-SiC substrates. Appl. Phys. Lett. 83, 4719–4721 (2003).  https://doi.org/10.1063/1.1632537 CrossRefGoogle Scholar
  3. 3.
    R. Pietruszka, B.S. Witkowski, S. Gieraltowska et al., New efficient solar cell structures based on zinc oxide nanorods. Sol. Energy Mater. Sol. Cells 143, 99–104 (2015).  https://doi.org/10.1016/j.solmat.2015.06.042 CrossRefGoogle Scholar
  4. 4.
    F. Teng, L. Zheng, K. Hu, H. Chen, Y. Li, Z. Zhang, X. Fang, A surface oxide thin layer of copper nanowires enhanced the UV selective response of a ZnO film photodetector. J. Mater. Chem. C 4, 8416–8421 (2016).  https://doi.org/10.1039/C6TC02901A CrossRefGoogle Scholar
  5. 5.
    H. Lin, S.M. Zhou, J.H. Zhou et al., Structural and optical properties of a-plane ZnO thin films synthesized on gamma-LiAlO(2) (302) substrates by low-pressure metal-organic chemical vapor deposition. Thin Solid Films 516, 6079–6082 (2008).  https://doi.org/10.1016/j.tsf.2007.10.128 CrossRefGoogle Scholar
  6. 6.
    S. Bhatia, N. Verma, A. Mahajan, R.K. Bedi, Characterization of ZnO films based sensors prepared by different techniques. Appl. Mech. Mater. 772, 50–54 (2015).  https://doi.org/10.4028/www.scientific.net/AMM.772.50 CrossRefGoogle Scholar
  7. 7.
    W.-J. Chen, W.-L. Liu, S.-H. Hsieh, Y.-G. Hsu, Synthesis of ZnO:Al transparent conductive thin films using sol-gel method. Procedia Eng. 36, 54–61 (2012).  https://doi.org/10.1016/j.proeng.2012.03.010 CrossRefGoogle Scholar
  8. 8.
    N.V. Kaneva, C.D. Dushkin, Preparation of nanocrystalline thin films of ZnO by sol-gel dip coating. Bulg. Chem. Commun. 43, 259–263 (2011)Google Scholar
  9. 9.
    S. Bhatia, N. Verma, R.K. Bedi, Optical application of Er-doped ZnO nanoparticles for photodegradation of direct red-31 dye. Opt. Mater. 62, 392–398 (2016).  https://doi.org/10.1016/j.optmat.2016.10.013 CrossRefGoogle Scholar
  10. 10.
    N. Srinatha, Y.S. No, V.B. Kamble et al., Effect of RF power on the structural, optical and gas sensing properties of RF-sputtered Al doped ZnO thin films. RSC Adv 6, 9779–9788 (2016).  https://doi.org/10.1039/C5RA22795J CrossRefGoogle Scholar
  11. 11.
    L. Saikia, D. Bhuyan, M. Saikia, B. Malakar, D.K. Dutta, P. Sengupta, Photocatalytic performance of ZnO nanomaterials for self sensitized degradation of malachite green dye under solar light. Appl. Catal. A Gen. 490, 42–49 (2015).  https://doi.org/10.1016/j.apcata.2014.10.053 CrossRefGoogle Scholar
  12. 12.
    N. Nafarizal, Precise control of metal oxide thin films deposition in magnetron sputtering plasmas for high performance sensing device fabrication. Procedia Chem. 20, 93–97 (2016).  https://doi.org/10.1016/j.proche.2016.07.016 CrossRefGoogle Scholar
  13. 13.
    M. Dwivedi, A. Bhargava, A. Sharma, V. Vyas, G. Eranan, CO sensor using ZnO thin film derived by RF magnetron sputtering technique. IEEE Sens. 14, 1577–1582 (2014).  https://doi.org/10.1109/JSEN.2014.2298879 CrossRefGoogle Scholar
  14. 14.
    X. Peng, Z. Wang, Y. Song et al., Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering. Sci. China Ser. G: Phys. Mech. Astron. 50, 281–286 (2007).  https://doi.org/10.1007/s11433-007-0007-0 CrossRefGoogle Scholar
  15. 15.
    R.O. Ndong, H.M. Omanda, P. Soulounganga, Effect of target to substrate distance on the rf magnetron sputtered ZnO thin films. Int. J. Mater. Sci. 17, 122–126 (2013)Google Scholar
  16. 16.
    M. Becerril, H. Silva-López, A. Guillén-Cervantes, O. Zelaya-Ángel, Aluminum-doped ZnO polycrystalline films prepared by co-sputtering of a ZnO-Al target. Rev. Mex. Fis. 60, 27–31 (2014)Google Scholar
  17. 17.
    J.-W. Hoon, K.-Y. Chan, J. Krishnasamy, T.-Y. Tou, Zinc oxide thin films fabricated with direct current magnetron sputtering deposition technique. Physics 1328, 235–237 (2011).  https://doi.org/10.1063/1.3573740 CrossRefGoogle Scholar
  18. 18.
    S. Bhatia, N. Verma, R.K. Bedi, Applied Surface Science Sn-doped ZnO nanopetal networks for efficient photocatalytic degradation of dye and gas sensing applications. Appl. Surf. Sci. 407, 495–502 (2017).  https://doi.org/10.1016/j.apsusc.2017.02.205 CrossRefGoogle Scholar
  19. 19.
    X. Fang, L. Hu, C. Ye, L. Zhang, One-dimensional inorganic semiconductor nanostructures: a new carrier for nanosensors. Pure Appl. Chem. 82, 2185–2198 (2010)CrossRefGoogle Scholar
  20. 20.
    V. Kumar, V. Kumar, S. Som et al., Effect of annealing on the structural, morphological and photoluminescence properties of ZnO thin films prepared by spin coating. J. Colloid Interface Sci. 428, 8–15 (2014).  https://doi.org/10.1016/j.jcis.2014.04.035 CrossRefGoogle Scholar
  21. 21.
    S. Bhatia, N. Verma, R.K. Bedi, Varied sensing characteristics of in- doped ZnO films prepared by sol gel spin coating technique. Indian J Pure Appl Phys 13, 54–58 (2017)Google Scholar
  22. 22.
    N.K. Ponon, D.J.R. Appleby, E. Arac et al., Effect of deposition conditions and post deposition anneal on reactively sputtered titanium nitride thin films. Thin Solid Films 578, 31–37 (2015).  https://doi.org/10.1016/j.tsf.2015.02.009 CrossRefGoogle Scholar
  23. 23.
    A. Taabouche, A. Bouabellou, F. Kermiche et al., Effect of substrates on the properties of ZnO thin films grown by pulsed laser deposition. Adv. Mater. Phys. Chem. 3, 209–213 (2013).  https://doi.org/10.4236/ampc.2013.34031 CrossRefGoogle Scholar
  24. 24.
    S. Bhatia, N. Verma, R.K. Bedi, Effect of aging time on gas sensing properties and photocatalytic efficiency of dye on in-Sn co-doped ZnO nanoparticles. Mater. Res. Bull. (2016).  https://doi.org/10.1016/j.materresbull.2016.12.011 CrossRefGoogle Scholar
  25. 25.
    S. Bhatia, N. Verma, R.K. Bedi, Ethanol gas sensor based upon ZnO nanoparticles prepared by different techniques. Results Phys. (2017).  https://doi.org/10.1016/j.rinp.2017.02.008 CrossRefGoogle Scholar
  26. 26.
    S. Bensmaine, B. Benyoucef, Effect of the temperature on ZnO thin films deposited by r.f. magnetron. Phys. Procedia. 55, 144–149 (2014).  https://doi.org/10.1016/j.phpro.2014.07.021 CrossRefGoogle Scholar
  27. 27.
    G.S. Hikku, R.K. sharma, R.V. William, P. Thiruramanathan, Al-Sn doped ZnO thin film nanosensor for monitoring NO2 concentration. J. Taibah Univ. Sci. (2016).  https://doi.org/10.1016/j.jtusci.2016.02.002 CrossRefGoogle Scholar
  28. 28.
    S. Bhatia, N. Verma, R. Kumar, Morphologically-dependent photocatalytic and gas sensing application of Dy-doped ZnO nanoparticles. J. Alloy Compd. 726, 1274–1285 (2017).  https://doi.org/10.1016/j.jallcom.2017.08.048 CrossRefGoogle Scholar
  29. 29.
    B. Yuliarto, S. Julia, M. Iqbal, M.F. Ramadhani, N. Nugraha, et al (2015) The effect of tin addition to ZnO nanosheet thin films for ethanol and isopropyl alcohol sensor applications. J. Eng. Technol. Sci. 47:76–91.  https://doi.org/10.5614/j.eng.technol.sci.2015.47.1.6 CrossRefGoogle Scholar
  30. 30.
    R.S. Reddy, A. Sreedhar, A.S. Reddy, S. Uthanna, Effect of film thickness on the structural morphological and optical properties of nanocrystalline ZnO films formed by RF magnetron sputtering. Adv. Mater. Lett. 3, 239–245 (2012).  https://doi.org/10.5185/amlett.2012.3329 CrossRefGoogle Scholar
  31. 31.
    D.S. Dhawale, D.P. Dubal, A.M. More et al., Room temperature liquefied petroleum gas (LPG) sensor. Sens. Actuators B: Chem. 147, 488–494 (2010).  https://doi.org/10.1016/j.snb.2010.02.063 CrossRefGoogle Scholar
  32. 32.
    N.C. Net, E. Engineering, U. Teknologi et al., (2015) Study on doping effect of Sn doped ZnO thin films for gas sensing application. In IEEE Student Conference on Research and Development, pp. 435–440Google Scholar
  33. 33.
    B. Radha, R. Rathi. K.C. Lalithambika, A. Thayumanavan, K. Ravichandran. S. Sriram, Effect of Fe doping on the photocatalytic activity of ZnO nanoparticles: experimental and theoretical investigations. J. Mater. Sci.: Mater. Electron. 29, 13474–13482 (2018)Google Scholar
  34. 34.
    Y. Ning, Z. Zhnag, F. Teng, X. Fang (2018) Novel transparent and self-powered UV photodetector based on crossed ZnO nanofiber array homojunction. Small 14, 1703754,  https://doi.org/10.1002/smll.201703754 CrossRefGoogle Scholar
  35. 35.
    S. Bhatia, R.K. Bedi, Morphological, electrical and optical properties of zinc oxide films grown on different substrates by spray pyrolysis technique. Nanostruct. Thin Films III 7766, 776610–776610 (2010).  https://doi.org/10.1117/12.863878 CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  1. 1.PG Department of PhysicsKanya Maha VidyalayaJalandharIndia
  2. 2.IKG Punjab Technical UniversityKapurthalaIndia
  3. 3.Lyallpur Khalsa College of EngineeringJalandharIndia

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