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Empirical expressions for the spectral dependence of the refractive index for the case of thin-film silicon and some of its common alloys

  • Saeed Moghaddam
  • Stephen K. O’Leary
Article
  • 8 Downloads

Abstract

We aim to model the spectral dependence of the refractive index associated with thin-film silicon, and some of its common alloys, using a series of elementary polynomial fits. For the purposes of this particular analysis, experimental data sets for the refractive index as a function of the photon energy corresponding to samples of thin-film silicon, and its alloy with germanium and carbon, prepared through evaporation, plasma enhanced chemical vapor deposition, and dc sputtering, are considered, this range of results providing a reasonably representative sampling over the thin-film silicon genome. The results of this analysis, i.e., the polynomials that arise from these fits, are explicitly tabulated. We believe that such models will offer the thin-film silicon community a number of advantages, including the ease with which such a result can be replicated, manipulated, and employed by fellow thin-film silicon researchers in their analyzes of this material system.

Notes

Acknowledgements

The authors gratefully acknowledge financial support from the Natural Sciences and Engineering Research Council of Canada

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Authors and Affiliations

  1. 1.School of EngineeringThe University of British ColumbiaKelownaCanada

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