Study of gamma-ray radiation effects on the passivation properties of atomic layer deposited Al2O3 on silicon using deep-level transient spectroscopy

  • Zhe Chen
  • Peng DongEmail author
  • Meng Xie
  • Yun Li
  • Xuegong Yu
  • Yao Ma


Aluminum oxide (Al2O3) has emerged as a potential dielectric material and exhibited an excellent passivation property on silicon surface. However, such oxide layer is extremely sensitive to γ-ray irradiation. In this work, deep-level transient spectroscopy has been applied to study the influence of γ-ray irradiation on the passivation properties of atomic layer deposited Al2O3 on silicon. It is shown that γ-ray irradiation leads to a significant increase of interface state density (Dit). Meanwhile, its energy distribution is broadened and shifts deeper with respect to the top of valence band, and therefore evolves into more efficient recombination centers for carriers. Besides, capacitance–voltage (C–V) curves shows a progressive shift toward the negative voltages with increased radiation doses. This indicates the hole trapping in Al2O3, which can neutralize the negatively charged defects and therefore degrade its field-effect passivation. Hence, the passivation quality of Al2O3 on silicon deteriorates significantly after γ-ray radiation.



This work was supported by Science Challenge Project (No. TZ2016003-1), National Natural Science Foundation of China (Nos. 61604139 and 51532007).

Compliance with ethical standards

Conflict of interest

The authors declare that they have no competing interests and agree to the submission of this paper.

Research involving human and animal participants

This research involves no human participants and/or animals.


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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  • Zhe Chen
    • 1
  • Peng Dong
    • 1
    Email author
  • Meng Xie
    • 2
  • Yun Li
    • 3
  • Xuegong Yu
    • 2
  • Yao Ma
    • 3
  1. 1.Microsystem & Terahertz Research Center and Institute of Electronic EngineeringChina Academy of Engineering PhysicsMianyangPeople’s Republic of China
  2. 2.State Key Laboratory of Si Materials and School of Materials Science and EngineeringZhejiang UniversityHangzhouPeople’s Republic of China
  3. 3.Department of PhysicsSichuan UniversityChengduPeople’s Republic of China

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