Synthesis and electrical properties of Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanoneedles prepared by the hybrid sol–gel method

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Abstract

Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanoneedles (PZT–ZnOn) were successfully prepared on Pt/Cr/SiO2/Si substrates by the hybrid sol–gel method via spin-coating ZnOn suspension and lead zirconate titanate (PZT) sol. To control the orientation of the films, a PbTiO3 (PT) layer was first deposited as a seed layer. Effects of annealing method and ZnOn contents on the corresponding orientation and crystallization of PZT–ZnOn films were investigated by XRD and SEM. The results show that all the PZT–ZnOn composite thick films have pure perovskite structure and high-quality film surface. The dielectric and ferroelectric properties of the PZT–ZnOn films are close to the PZT films, and have a little decrease with the increasing of the ZnOn contents.

Keywords

Thick Film Seed Layer Lead Zirconate Titanate Remanent Polarization Rapid Thermal Process 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgments

This work was supported by the National High-Technology Research and Development Program of China (No. 2007AA03Z103), the National Natural Science Foundation of China (No. 50872159 and 50972014), and the Key Laboratory Foundation of Sonar Technology of China (No. 9140C24KF0901).

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Copyright information

© Springer Science+Business Media New York 2013

Authors and Affiliations

  1. 1.School of Materials Science and EngineeringBeijing Institute of TechnologyBeijingChina
  2. 2.School of Information EngineeringCentral University for NationalitiesBeijingChina

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