Two-dimensional nanoparticle arrays formed by dewetting of thin gold films deposited on pre-patterned substrates
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We demonstrate the formation of accurate 2D gold nanoparticle arrays via solid-state dewetting on a pre-patterned substrate. The annealing-induced dewetting of Au film on both flat and pre-patterned SiO2 substrates is investigated. The pre-patterned structures affect clearly the formation of nanoparticles, and there is a depth effect of the pre-patterned grooves on the formation of nanoparticles during dewetting. Especially in pre-patterned areas with deep grid grooves (depth 150 nm) there is almost one single particle formed in the flat areas of every unit square, thus resulting in a very periodic 2D structure of gold nanoparticles.
KeywordsGroove Width Groove Depth Nanoparticle Array Deep Groove Dewetting Process
The authors thank Mr. Joachim Döll from the Department of Micromechanical Systems at Ilmenau University of Technology for deposition of Au films.