Near-field scanning optical microscopy of quantum dot broad area laser diodes

  • S. I. Jung
  • H. Y. Yeo
  • I. YunEmail author
  • J. Y. Leem
  • I. K. Han
  • J. S. Kim
  • J. I. LeeEmail author
Original Paper


Near-field scanning optical microscopy (NSOM) studies of self-assembled InAs quantum dot broad area laser diodes (QD-BALDs) with different active layer were performed. The high resolution (<100 nm) of NSOM provides a detailed mapping of the laser output from the active region. Representative near-field electroluminescence (EL) spectra taken the cross section of the QD-BALD structures below and above the lasing threshold are plotted. Moreover, spatially resolved near-field scanning images of the waveguide are obtained by collecting the EL as the tip is scanned across the surface. Such near-field measurements show a relationship between laser emission and different active layer structure.


Active Layer Atomic Layer Epitaxy Lower Threshold Current Density Active Layer Structure Reemission Effect 
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Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  1. 1.Department of Electrical and Electronic EngineeringYonsei UniversitySeoulRepublic of Korea
  2. 2.School of Nano Engineering, Institute for Nanotechnology ApplicationsInJe UniversityKimhaeRepublic of Korea
  3. 3.Nano Devices Research Center, Korea Institute of Science and Technology (KIST)SeoulRepublic of Korea
  4. 4.Basic Research Laboratory, Electronics and Telecommunications Research Institute (ETRI)DaejeonRepublic of Korea
  5. 5.Advanced Industrial Metrology Group, Korea Research Institute of Standards and Science (KRISS)DaejeonRepublic of Korea

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