Journal of Materials Science

, Volume 48, Issue 2, pp 920–928 | Cite as

Microstructure analysis of ion beam-induced surface nanostructuring of thin Au film deposited on SiO2 glass

  • Xuan Meng
  • Tamaki ShibayamaEmail author
  • Ruixuan Yu
  • Shinya Takayanagi
  • Seiichi Watanabe


Effects of the irradiation dose on surface nanostructuring accompanied with the dewetting process of Au films deposited on SiO2 glass were examined using an atomic force microscope and a scanning electron microscope. In addition, the microstructural evolution and the chemical concentration of Au films were investigated using a transmission electron microscope equipped with an energy-dispersive spectrometer. As increasing the Ar ion irradiation dose, the lattice expansion of Au nanoscale islands sustained on the SiO2 glass was observed and irradiation-induced lattice defects together with irradiation-induced interface ion mixing were accounted for this lattice expansion. Finally a layer of photosensitive Au nanoballs with highly spherical shape embedded in a SiO2 substrate was obtained after Ar ion irradiation to 10.0 × 1016/cm2 and some of Au nanoballs were found to be single crystals. As the irradiation energy of the Ar ions increased from 100 to 150 keV, the average diameter of the Au nanoballs in the substrate increased and the red shift of the SPR peak was observed. This tendency of the experimental SPR peaks corresponded with that of the theoretically calculated SPR peaks using Mie solution.


Lattice Expansion Surface Nanostructuring Surface Plasmon Resonance Peak SiO2 Glass SiO2 Substrate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.





Atomic force microscope


Transmission electron microscope


Scanning electron microscope


Energy-dispersive spectrometry


Surface plasmon resonance


Face-centered cubic



This study was partly supported by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (A) #21241025. Mr. Xuan MENG thanks Chinese Scholarship Council’s stipend support to carry out this work in Hokkaido University. The authors thank Prof. S. Yatsu, Mr. K. Ohkubo, Dr. Z. Yang, Dr. Y. Yoshida, and Mr. J. Wajima, for their experimental assistance and helpful discussions.


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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Xuan Meng
    • 1
    • 3
  • Tamaki Shibayama
    • 2
    Email author
  • Ruixuan Yu
    • 1
  • Shinya Takayanagi
    • 1
  • Seiichi Watanabe
    • 2
  1. 1.Graduate School of EngineeringHokkaido UniversitySapporoJapan
  2. 2.Center for Advanced Research of Energy Conversion Materials, Faculty of EngineeringHokkaido UniversitySapporoJapan
  3. 3.School of Nuclear Science and TechnologyLanzhou UniversityLanzhouChina

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