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Journal of Materials Science

, Volume 48, Issue 3, pp 979–988 | Cite as

Thermo-mechanical and fracture properties in single-crystal silicon

  • Alex MasolinEmail author
  • Pierre-Olivier Bouchard
  • Roberto Martini
  • Marc Bernacki
Review

Abstract

Single-crystal silicon is extensively used in the semiconductor industry. Even though most of the steps during processing involve somehow thermo-mechanical treatment of silicon, we will focus on two main domains where these properties play a major role: cleaving techniques used to obtain a thin silicon layer for photovoltaic applications and MEMS. The evolution and validation of these new processes often rely on numerical simulations. The accuracy of these simulations, however, requires accurate input data for a wide temperature range. Numerous studies have been performed, and most of the needed parameters are generally available in the literature, but unfortunately, some discrepancies are observed in terms of measured data regarding fracture mechanics parameters. The aim of this article is to gather all these data and discuss the validity of these properties between room temperature and 1273 K. Particular attention is given to silicon fracture properties depending on crystallographic orientations, and to the brittle–ductile temperature transition which can strongly affect the quality of silicon layers.

Keywords

Fracture Toughness Fracture Property Dislocation Velocity Crack Propagation Direction Mobile Dislocation Density 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

The authors wish to thank EC for the financial support for this research (SUGAR Project FP7 No. 256752). A special thanks to Guillaume Lebret.

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Alex Masolin
    • 1
    • 2
    Email author
  • Pierre-Olivier Bouchard
    • 3
  • Roberto Martini
    • 1
    • 2
  • Marc Bernacki
    • 3
  1. 1.KU LeuvenLeuvenBelgium
  2. 2.ImecLeuvenBelgium
  3. 3.Mines ParisTech, CEMEF-Centre de Mise en Forme des Matériaux, CNRS UMR 7635Sophia Antipolis CedexFrance

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