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Journal of Materials Science

, Volume 44, Issue 19, pp 5339–5344 | Cite as

Orientation controlled deposition of Pb(Zr,Ti)O3 films using a micron-size patterned SrRuO3 buffer layer

  • Ken NishidaEmail author
  • Takashi Yamamoto
  • Minoru Osada
  • Osami Sakata
  • Shigeru Kimura
  • Keisuke Saito
  • Masamichi Nishide
  • Takashi Katoda
  • Shintaro Yokoyama
  • Hiroshi Funakubo
Ferroelectrics

Abstract

Orientation controlled, micron-sized dot-patterned PZT films were grown by metal organic chemical vapor phase deposition (MOCVD), and their crystal structure was evaluated. A micron-size dot-patterned SrRuO3 (SRO) buffer layer was initially prepared by MOCVD through a metal mask on the (111) Pt/Ti/SiO2/Si substrate. Then, a PZT film was deposited over the entire substrate. Micron-beam X-ray diffraction and Raman spectroscopy indicated that (111)-orientated PZT was prepared on the SRO covered area, while the (100)/(001)-orientated one was directly grown on Pt-covered substrates. The PZT film grown on SRO was thinner than that on the Pt-covered substrate. The estimated ferroelectric property on the center of the dot pattern was larger than that at the circumference by Raman spectroscopy because the strain is accelerated at the center of the dot.

Keywords

Raman Spectroscopy Ferroelectric Property Bottom Electrode Soft Mode Outer Circumference 

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  • Ken Nishida
    • 1
    Email author
  • Takashi Yamamoto
    • 1
  • Minoru Osada
    • 2
  • Osami Sakata
    • 3
  • Shigeru Kimura
    • 3
  • Keisuke Saito
    • 4
  • Masamichi Nishide
    • 5
  • Takashi Katoda
    • 5
  • Shintaro Yokoyama
    • 6
  • Hiroshi Funakubo
    • 6
  1. 1.Department of Communication EngineeringNational Defense AcademyYokosukaJapan
  2. 2.Advanced Materials LaboratoryNational Institute for Materials Science (NIMS)TsukubaJapan
  3. 3.Materials Science DivisionJapan Synchrotron Radiation Research InstituteSayoJapan
  4. 4.Bruker AXS K. K.YokohamaJapan
  5. 5.Department of Electronic and Photonic System EngineeringKochi University of TechnologyKochiJapan
  6. 6.Department of Innovative and Engineered MaterialsTokyo Institute of TechnologyYokohamaJapan

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