Journal of Materials Science

, Volume 44, Issue 13, pp 3488–3497 | Cite as

Tribological properties and high-speed drilling performance of Zr–C:H:Nx% coatings with different amounts of nitrogen addition

  • W. H. KaoEmail author


Zr–C:H:Nx% coatings with nitrogen additions ranging from 0 to 29 at.% are deposited on AISI M2 steel substrates and micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering technique. The tribological properties of the coatings are tested against AISI 52100 steel balls under loads of 10 and 100 N, respectively, using an oscillating friction and wear tester. The drilling performance of the coated micro-drills is evaluated by performing high-speed through-hole drilling tests using printed circuit boards as a test material. The wear testing results reveal that the Zr–C:H:N8% coating has excellent tribological properties, including a low wear depth, a low friction coefficient, and an extended lifetime. Meanwhile, the drilling tests reveal that the Zr–C:H:N8% coating increases the tool life of the micro-drill by a factor of five compared to an uncoated micro-drill when used for the high-speed through-hole drilling of PCBs and yields a considerable improvement in the machining quality of the drilled hole.


Friction Coefficient Tribological Property Steel Ball Wear Scar Transfer Layer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The author would like to thank the National Science Council of the Republic of China for financially supporting this research project under Contract No. NSC 96-2212-E270-011.


  1. 1.
    Harris SJ, Weiner AM, Meng WJ (1997) Wear 211:208CrossRefGoogle Scholar
  2. 2.
    Ronkainen H, Varjus S, Koskinen J, Holmberg K (2000) Wear 249:260CrossRefGoogle Scholar
  3. 3.
    Zhang W, Tanaka A (2004) Tribol Int 37:975CrossRefGoogle Scholar
  4. 4.
    Ohana T, Nakamura T, Suzuki M, Tanaka A, Koga Y (2004) Diamond Relat Mater 13:1500CrossRefGoogle Scholar
  5. 5.
    Kao WH, Su YL, Yao SH, Luan JM (2005) Mater Sci Eng A 398:233CrossRefGoogle Scholar
  6. 6.
    Charitidis C, Logothetidis S (2005) Thin Solid Films 482:120CrossRefGoogle Scholar
  7. 7.
    Deng J, Bran M (1995) Diamond Relat Mater 4:936CrossRefGoogle Scholar
  8. 8.
    Liu Y, Erdenir A, Meletis EI (1996) Surf Coat Technol 82:48CrossRefGoogle Scholar
  9. 9.
    Ronkainen H, Likoen J, Koskinen J, Varjus S (1996) Surf Coat Technol 79:87CrossRefGoogle Scholar
  10. 10.
    Sheeja D, Tay BK, Krishnan SM, Nung LN (2003) Diamond Relat Mater 12:1389CrossRefGoogle Scholar
  11. 11.
    Wei Z, Akihiro T (2004) Tribol Int 37:975CrossRefGoogle Scholar
  12. 12.
    Yan X, Xu T, Chen G, Yang S, Liu H (2004) Appl Surf Sci 236:328CrossRefGoogle Scholar
  13. 13.
    Yuichi A, Naoto O (2004) Tribol Int 37:941CrossRefGoogle Scholar
  14. 14.
    Narayan RJ (2005) Appl Surf Sci 245:420CrossRefGoogle Scholar
  15. 15.
    Miyake S, Saito T, Yasuda Y, Okamoto Y, Kano M (2004) Tribol Int 37:751CrossRefGoogle Scholar
  16. 16.
    Inkin VN, Kirpilenko GG, Dementjev AA, Maslakov KI (2000) Diamond Relat Mater 9:715CrossRefGoogle Scholar
  17. 17.
    Yang S, Camino D, Jones AHS, Teer DG (2000) Surf Coat Technol 124:110CrossRefGoogle Scholar
  18. 18.
    Wang DY, Chang CL, Ho WY (1999) Thin Solid Films 355–356:246CrossRefGoogle Scholar
  19. 19.
    Wei Q, Narayan RJ, Narayan J, Sankar J, Sharma AK (1998) Mater Sci Mater B 53:262Google Scholar
  20. 20.
    Dimigen H, Hübsch H, Memming R (1987) Appl Phys Lett 50:1056CrossRefGoogle Scholar
  21. 21.
    Scharf TW, Ott RD, Yang D, Barnard JA (1999) J Appl Phys 85:3142CrossRefGoogle Scholar
  22. 22.
    Allon M, Croitoru N (1997) Diamond Relat Mater 6:555CrossRefGoogle Scholar
  23. 23.
    Guerino M, Massi M, Maciel HS, Otani C, Mansano RD (2003) Microelectr J 34:639CrossRefGoogle Scholar
  24. 24.
    Klibanov L, Croitoru N, Seidman A, Scheffer L, Ben-Jacob E (1997) Diamond Relat Mater 6:1868CrossRefGoogle Scholar
  25. 25.
    Liu LX, Liu E (2005) Surf Coat Technol 198:189CrossRefGoogle Scholar
  26. 26.
    Liu H, Tanaka A, Kumagai T (1999) Thin Solid Films 352:145CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Institute of Mechatronoptic SystemsChienkuo Technology UniversityChanghuaTaiwan

Personalised recommendations