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Journal of Materials Science

, Volume 43, Issue 9, pp 3162–3165 | Cite as

Study on dielectric and tunable properties of Cr-doped Ba0.6Sr0.4TiO3 thin films by rf sputtering

  • Mei-feng HuEmail author
  • Yue Zhuo
  • Sheng-xiang Wang
  • Yu Tian
Article

Abstract

Ba0.6Sr0.4TiO3 dielectric thin films doped by Cr(0, 1, 2.5, 5, 10 mol%) (BSTC) were prepared by radio frequency magnetron sputtering on Pt/Ti/SiO2/Si substrates. The structure and morphology of the BSTC thin films were studied by atomic force microscopy and X-ray diffraction. The effect of Cr doping on the dielectric properties of BST thin films were analyzed. The results show that the dielectric loss of Cr doping BST thin films is lower than that undoped, and the tunability increased with Cr doping. The thin film doped with 5 mol% Cr has the best dielectric properties. The tunability, loss and figure of merit (FOM) at 1 MHz were 38.9%, 0.0183, and 21.3, respectively.

Keywords

Dielectric Constant Dielectric Loss Loss Tangent Radio Frequency Magnetron Ferroelectric Thin Film 

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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Mei-feng Hu
    • 1
    Email author
  • Yue Zhuo
    • 1
  • Sheng-xiang Wang
    • 1
  • Yu Tian
    • 1
  1. 1.Department of Physics and Key Laboratory of Acoustic and Photonic Materials and Devices, Ministry of EducationWuhan UniversityWuhanPeople’s Republic of China

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