Selective laser sintering of barium titanate–polymer composite films
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A selective laser sintering process has been used to consolidate electro-ceramic thin films on silicon substrates. Methods of forming pre-positioned layers of barium titanate were investigated by spin-coating the feedstock powder mixed with a commercial polymer photo-resist. The ceramic–polymer composite was deposited directly onto a nickel film which was evaporated onto a silicon substrate, pre-oxidised to form an electrically insulating layer. A range of laser processing parameters was identified in which consolidated barium titanate layers could be formed. The laser power was found to be more influential in forming sintered microstructures than laser exposure time. The microstructure of barium titanate films is sensitive to the SLS laser-processing conditions, with the optimum laser powers for the processing of the BaTiO3–polymer found to be in the range 17–20 W. This article highlights the possibility of using ‘direct write’ techniques to produce piezoelectric materials upon silicon substrates.
KeywordsBaTiO3 Barium Titanate Selective Laser Sinter Feedstock Powder BaTiO3 Powder
The authors gratefully acknowledge the financial support of the Engineering and Physical Sciences Research Council.
- 1.Gebhardt A (2003) Rapid prototyping. Hanser Gardner Publications, pp 29–50Google Scholar
- 2.Venuvinod PK, Ma W (2004) Rapid prototyping-laser based and other technologies. Kluwer Academic Publishers, pp 1–21Google Scholar
- 3.Tsopanos S, Sutcliffe CJ, Owen I (2005) In: Proceedings of the fifth international conference on enhanced, compact and ultra-compact heat exchangers: science, engineering and technology, CHEGoogle Scholar
- 5.Chalker PR, Clare AT, Davies S, Sutcliffe CJ, Tsopanos S (2006) Mater Res Soc Symp Proc 890:93Google Scholar
- 12.Lines ME, Glass AM (1977) Principles and applications of ferroelectrics and related materials. Clarendon Press, OxfordGoogle Scholar
- 23.Ragulya AV (1998) Powder Metall Metal Ceram 37(7–8):137Google Scholar