Journal of Materials Science

, Volume 41, Issue 3, pp 873–903 | Cite as

Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science

  • D. S. McPhail


Secondary Ion Mass Spectrometry (SIMS) is a mature surface analysis technique with a vast range of applications in Materials Science. In this review article the SIMS process is described, the fundamental SIMS equations are derived and the main terminology is explained. The issue of quantification is addressed. The various modes of SIMS analysis including static SIMS, imaging SIMS, depth profiling SIMS and three-dimensional (3D) SIMS are discussed as are specialized analysis strategies such as the imaging of shallow bevels and cross-sections and reverse side analysis. SIMS is shown to be a useful sample preparation tool based on ion beam milling (with SIMS and Scanning Electron Microscopy (SEM) analysis providing end-point detection). The case studies shown illustrate the application of SIMS to several important materials including semiconductors, superconductors, glass, stainless steel, micrometeoroids, solid oxide fuel cell components, museum artifacts, aerospace alloys and biomaterials. Strategies for introducing SIMS into undergraduate education and thus increasing awareness are described. Finally some informed guesses are made as to the future directions of SIMS.


Collision Cascade Tracer Enrichment 40th Anniversary Figure 
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  1. 1.
    FEI, Brukmannring 40, 85764 Oberschleissheim, Munich, Germany, now
  2. 2.
    ION TOF GmbH, Gievenbecker Weg 15, D-48149 Munster, Germany,
  3. 3.
  4. 4.
    W. VANDERVORST and F. R. SHEPHERD, J. Vac. Sci. Technol. A 5 (1987) 313.CrossRefGoogle Scholar
  5. 5.
    S. C. C. WONG, R. HILL, P. BLENKINSOPP, N. P. LOCKYER, D. E. WEIBELAND and J. C. VICKERMAN, Appl. Surf. Sci. 203 (2003) 219.CrossRefGoogle Scholar
  6. 6.
    J. J. THOMSON, Philos. Mag. (1910) 752.Google Scholar
  7. 7.
    S. HOFMANN, Philos. Trans. Royal Soc. A 362(55–75) (2004) 1814.Google Scholar
  8. 8.
    K. WITTMAACK, Vacuum 34(1/2) (1984) 119.CrossRefGoogle Scholar
  9. 9.
    M. TOMITA, F. TAKAHASHI and F. Y. HOMMA, Nucl. Instrum. Phys. 85(1–4) (1994) 399.CrossRefGoogle Scholar
  10. 10.
    Ionoptika Ltd., Epsilon House, Chilworth Science Park, Southampton, SO16 7NS, UK.
  11. 11.
    Secondary Ion Mass Spectrometry, “A Practical Handbook for Depth Profiling and Bulk Impurity Analysis,” R. G. Wilson, F.A. Stevie and C.W. Magee (John Wiley and Sons, 1989) ISBN 0-471-51945-6.Google Scholar
  12. 12.
    D. PHINNEY, “Semi-Quantitative Analysis of Microstructures by Secondary Ion Mass Spectrometry,” in the Proceedings of EMAS 2005 (Florence, 2005) p. 73.Google Scholar
  13. 13.
    D. S. MCPHAIL and S. LITTLEWOOD, in SIMS VIII, edited by A. Benninghoven, K.T.F. Janssen, J. Tumpner and H.W. Werner (John Wiley, 1992, ISBN 0-471-93064-4) p. 407.Google Scholar
  14. 14.
    The International Roadmap for Semiconductors 2004 update,
  15. 15.
    M. G. DOWSETT, Appl. Surf. Sci. 203 (2003) 203.Google Scholar
  16. 16.
    Cameca France, 103 Boulevard Saint Denis, BP 6, 92403 Courbevoie cedex France,
  17. 17.
    G. GILLEN, R. LAREAU, J. BENNETT and F. STEVIE, SIMS XI: Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry, ‘Secondary Ion Mass Spectrometry SIMS XI’ (John Wiley and Sons, 1998, ISBN: 0-471-97826-4).Google Scholar
  18. 18.
    A. BENNINGHOVEN, P. BERTRAND, H. N. MIGEON and H. W. WERNER, SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry ‘Secondary Ion Mass Spectrometry SIMS XII’, (Elsevier, 2000, ISBN 0-444-50323-4).Google Scholar
  19. 19.
    SIMS XIII: Proceedings of the Thirteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics, Benninghoven, Applied Surface Science, 203 (2003) p. 203.Google Scholar
  20. 20.
    A. BENNINGHOVEN, J. L. HUNTER, JR. B. W. SCHUELER, H. E. SMITH and H. W. WERNER, SIMS XIV, Proceedings of the Fourteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics (Applied Surface Science, 2004).Google Scholar
  21. 21.
    A. BENNINGHOVEN, F. G. RUDENAUER and H. W. WERNER, Secondary Ion Mass Spectrometry (John Wiley and Sons, 1987, ISBN 0-471-01056-1).Google Scholar
  22. 22.
    J. C. VICKERMAN, A. BROWN and N. M. REED, Secondary Ion Mass Spectrometry (Oxford Science Publications, Oxford, 1989, ISBN 0-19-855625-X).Google Scholar
  23. 23.
    J. C. VICKERMAN, D. BRIGGS and A. HENDERSON, The Static SIMS Library (IM Publications, 2002, ISBN 0-9537848-5-1).Google Scholar
  24. 24.
    J. C. VICKERMAN and D. BRIGGS, ToF-SIMS: Surface Analysis by Mass Spectrometry, IM publications, 2002, ISBN 1-901019-03-9).Google Scholar
  25. 25.
  26. 26.
    M. G. DOWSETT, N. S. SMITH, D. R. BRIDGELAND, A. C. LOVEJOY and P. PENDRICK, in Secondary Ion and Mass Spectrometry SIMS XI, edited by A. Benninghoven, B. Hagenhoff, and H. W. Werner (John Wiley and Sons, 1998, ISBN: 0-471-97826-4) p. 367.Google Scholar
  27. 27.
    J. BELLINGHAM, M. G. DOWSETT, E. COLLART and D. KIRKWOOD, Appl. Surf. Sci. 203 (2003) 831.Google Scholar
  28. 28.
    R. B. BEALL, J. B. CLEGG, J. CASTAGNE, J. HARRIS, J. J. MURRAY and R. C. NEWMAN, Semiconductor Sci. Technol. 4 (1989) 1171.CrossRefGoogle Scholar
  29. 29.
    G. P. BEYER, D. S. MCPHAIL, A. KHAN and M. GHISONI, “Applications Of Particle And Laser Beams In Materials Technology NATO ASI Series” edited by P. Misaelides (Kluwer Academic Publishers, 1995) 151.Google Scholar
  30. 30.
    G. P. BEYER, D. S. MCPHAIL and M. GHISONI, “SIMS IX”, edited by A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner (John Wiley and Sons, 1994) 682.Google Scholar
  31. 31.
    R. LAREAU, in “Secondary Ion Mass Spectrometry SIMS VI,” edited by A. Benninghoven, A.M. Huber and H.W. Werner (Wiley, New York, 1988, ISBN 0-471-91832-6) p. 437.Google Scholar
  32. 32.
    J. HERNIMAN, J. S. YU and A. E. STATON BEVAN, Appl. Surf. Sci. 52(4) (1991) 289.CrossRefGoogle Scholar
  33. 33.
    C. M. HSU and D. S. MCPHAIL, Nuclear Instruments and Methods in Physics Research B-101(4) (1995) 427.Google Scholar
  34. 34.
    C. M. HSU, V. K. M. SHARMA, M. J. ASHWIN and D. S. MCPHAIL, Surface and Interface Analysis, 23(10) (1995) 665.CrossRefGoogle Scholar
  35. 35.
    K. P. JOHANSEN, D. S. MCPHAIL and S. FEARN, in “Microscopy of Semiconducting Materials, Proceedings of Institute of Physics Confernece Series (164)” 1999, p. 465.Google Scholar
  36. 36.
    S. FEARN and D. S. MCPHAIL, accepted for publication in the Journal of Applied Surface Science (January 2005).Google Scholar
  37. 37.
    N. J. MONTGOMERY, J. L. MACMANUS-DRISCOLL, D. S. MCPHAIL, R. J. CHATER, B. MOECKLY and K. CHAR, Thin Solid Films 317(1/2) (1998) 237.CrossRefGoogle Scholar
  38. 38.
    A. LODDING, H. ODELIUS, D. E. CLARK and L. O. WERME, Mikrochimica Acta 11 (1985) 145.Google Scholar
  39. 39.
    G. G. WICKS, ‘Nuclear Waste Glasses: Corrosion Behaviour and Field Tests’ in Corrosion of Glass, Ceramics, and Superconductors” edited by D. E. Clark and B. K. Zoitos (Noyes Publication, 1991).Google Scholar
  40. 40.
    S. E. T. HOGG, D. S. MCPHAIL, P. S. ROGERS and V. L. OAKLEY, ‘Mono-Functional Organosilanes as Candidates for Treatments of Crizzling in Glasses’ in “the Proceedings of the ICOM-CC Working Group”, edited by Alice. B. Paterkis (1998) p. 53.Google Scholar
  41. 41.
    S. FEARN, D. S. MCPHAIL and V. OAKLEY, Appl. Surf. Sci. 231/232C (2004) 510.CrossRefGoogle Scholar
  42. 42.
    J. L. RYAN, ‘The Atmospheric Deterioration of Glass: Studies of Decay Mechanisms and Conservation Techniques’, PhD Thesis, University of London, 1996.Google Scholar
  43. 43.
    V. OAKLEY, ‘Vessel Glass Deterioration at the Victoria and Albert Museum: Surveying the Collection’, The Conservator, 14 (1990) p. 30.Google Scholar
  44. 44.
    D. E. CLARK, L. L. HENCH and C. G. PANTANO, ‘Corrosion of Glass’, New York, Books for Industry (1976).Google Scholar
  45. 45.
    M. DOWSETT and A. ADRIEANS, Nucl. Instr. Methods Phys. Res. B 226 (1–2) (2004) 226.Google Scholar
  46. 46.
    Why Stainless Steel Corrodes, M.P. Ryan, D.E. Williams, R.J. Chater, B.M. Hutton and D.S. McPhail, Nature 415 (6873) (14th February 2002) p. 770.Google Scholar
  47. 47.
    E. E. REES, D. S. MCPHAIL, M. P. RYAN, M. G. DOWSETT and J. KELLY, Appl. Surf. Sci. 203/204 (2003) 660.CrossRefGoogle Scholar
  48. 48.
    K. SIERADZKI and R. C. NEWMAN, J. Electrochem. Soc. (1984) 1979.Google Scholar
  49. 49.
    R. J. CHATER, G. A. GRAHAM, D. S. MCPHAIL and A. T. KEARSLEY, Appl. Surf. Sci. 231/232 (2004) 893.CrossRefGoogle Scholar
  50. 50.
    G. A. GRAHAM, R. J. CHATER, D. S. MCPHAIL, A. T. KEARSLEY, M. R. LEE, S. KETTLE and I. P. WRIGHT, Meteoritics & Planetary Science 37(7) (2002) A. 56.Google Scholar
  51. 51.
    G. A. GRAHAM, P. G. GRANT, R. J. CHATER, A. J. WESTPHAL, A. T. KEARSLEY, C. SNEAD, G. DOMINGUEZ, A. L. BUTTERWORTH, D. S. MCPHAIL, G. BENCH and J. P. BRADLEY, ibid. 39(9) (2004) 1461.CrossRefGoogle Scholar
  52. 52.
    G. A. GRAHAM, A. T. KEARSLEY, A. L. BUTTERWORTH, P. A. BLAND, M. J. BURCHELL, D. S. MCPHAIL, M. J. BURCHELL, R. CHATER, M. M. GRADY, I. P. WRIGHT and C. T. PILLINGER, Advances in Space Research 34 (2004) 2292.CrossRefGoogle Scholar
  53. 53.
    R. J. CHATER, S. CARTER, J. A. KILNER and B. C. H. STEELE, Solid State Ionics, 53–56, (1992) 859.CrossRefGoogle Scholar
  54. 54.
    K. HALLETT, D. THICKETT, D. S. MCPHAIL and R. J. CHATER, Applied Surface Science 203–204 (2003) 789.CrossRefGoogle Scholar
  55. 55.
    M. SOKHAN, P. GASPAR, D. S. MCPHAIL, A. CUMMINGS, L. CORNISH, F. HARTOG, C. HUBBARD, V. OAKLEY and J. F. MERKEL, in Journal of Cultural Heritage 4, no. 1001 (Elsevier Science, January 2003) p. 230.Google Scholar
  56. 56.
    Lynton Lasers Ltd. Lynton House, Manor Lane, Holmes Chapel, Cheshire. CW4 8AF Tel: +44 (0)1477 536 977, Fax: +44 (0)1477 536 978.
  57. 57.
    D. S. MCPHAIL, M. SOKHAN, E. E. REES, B. CLIFF, A. J. ECCLES and R. J. CHATER, Appl. Surf. Sci. 231–232 (2004) 967.CrossRefGoogle Scholar
  58. 58.
    D. P. GARRIGA-MAJO, R. J. CHATER, D. MCPHAIL and B. A. SHOLLOCK, International Journal of Inorganic Materials 1 (1999) 325.CrossRefGoogle Scholar
  59. 59.
    A. A. ALIBHAI, D. S. MCPHAIL and B. A. SHOLLOCK, in SIMS 12 (see 14 above) (2000) p. 867.Google Scholar
  60. 60.
    A. A. ALIBHAI, D. P. GARRIGA-MAJO, B. A. SHOLLOCK and D. S. MCPHAIL, Superalloys 2000, 684 (ISBN 0-87339-477-1) (2000) p. 675.Google Scholar
  61. 61.
    A. M. BELU, D. J. GRAHAM and D. G. CASTNER, Biomaterials, 24 (2003) 3635.CrossRefGoogle Scholar
  62. 62.
    J. CLERC, C. FOURRE and P. FRAGU, Cell Biology International, 21(10) (1997) 619.CrossRefGoogle Scholar
  63. 63.
    P. FRAGU and E. KAHN, Micropscopy Research and Techniques, 36(4) (1997) 296.CrossRefGoogle Scholar
  64. 64.
    N. P. LOCKYER and J. C. VICKERMAN, Applied Surface Science 231(15) (2004) 377.CrossRefGoogle Scholar
  65. 65.
    R. J. CHATER and D. S. MCPHAIL, Applied Surface Science, 231–232 (2004) 141.CrossRefGoogle Scholar
  66. 66.
    Millbrook Instruments Ltd, Blackburn, BB1 5QB, UK : Web address at

Copyright information

© Springer Science + Business Media, Inc. 2006

Authors and Affiliations

  1. 1.The Department of MaterialsImperial CollegeLondonEngland, UK

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