Advertisement

Journal of Materials Science

, Volume 42, Issue 12, pp 4480–4484 | Cite as

Improvement electrical properties of sol–gel derived lead zirconate titanate thick films for ultrasonic transducer application

  • Q. F. ZhouEmail author
  • K. K. Shung
  • Y. Huang
Article

Abstract

In this work, a fabrication process of piezoelectric PZT [Pb(Zr0.52Ti0.48)O3] thick films up to 60 μm deposited on silicon and aluminum substrates is reported. Crystalline spherical modified PZT powder about 300 nm in diameter was used as filler. PZT polymeric precursor produced by Chemat Inc. was used as the matrix material. Spinning films were annealed at 700 °C for one hour in the furnace in air. The thickness of the thick films was measured using a scanning electron microscope (SEM). Compared with previous piezoelectric PZT composite films, the modified piezoelectric thick films exhibit better dielectric properties. The dielectric constant is over 780 and dielectric loss is 0.04 at 1 KHz. Using a PiezoCAD model, the high frequency transducer was designed and fabricated. It showed a bandwidth of 75% at 40 MHz.

Keywords

Thick Film Match Layer Backing Layer High Frequency Transducer High Frequency Ultrasound Imaging 

Notes

Acknowledgments

The authors would like to thank Dr. Q. Zhang for fabrication of transducers. This research was supported by NIH P41-EB2182 and Phase I R43 RR014127-01A1.

References

  1. 1.
    Shung KK, Zipparo M (1996) IEEE Eng Med Biol 15:20CrossRefGoogle Scholar
  2. 2.
    Lockwwod GR, Turnbull DH, Christopher DA, Foster FS (1996) IEEE Eng Med Biol 15:60CrossRefGoogle Scholar
  3. 3.
    Sugiyama S, Takagi A, Tsuzuki K (1991) Jpn J Appl Phys 30:2170CrossRefGoogle Scholar
  4. 4.
    Barrow DA, Petroff TE, Sayer M (1995) Surface Coatings Technol 76–77:113CrossRefGoogle Scholar
  5. 5.
    Chen HD, Udayakumar KR, Gaskey CJ, Cross LE (1996) J Am Ceramic Soc 79:2189CrossRefGoogle Scholar
  6. 6.
    Kurchania R, Milne SJ (1999) J Mater Res 14:1852CrossRefGoogle Scholar
  7. 7.
    Zhou QF, Hong E, Wolf R, Trolier-McKinstry S (2000) Mater Res Soc Proc 655:c11.7.1CrossRefGoogle Scholar
  8. 8.
    Lukaces M, Sayer M, Foster S (2000) IEEE Trans Ultrasonics Ferroelect Frequency Control 47:148CrossRefGoogle Scholar
  9. 9.
    Lukaces M, Olding T, Sayer M, Tasker R, Sherrit S (1998) J Appl Phys 85:2835CrossRefGoogle Scholar
  10. 10.
    Zhou QF, Chan HLW, Choy CL (2000) Thin Solid Films 375:95CrossRefGoogle Scholar
  11. 11.
    Zhou QF, Zhang QQ, Trolier-McKinstry S (2003) J Appl Phys 94:3397CrossRefGoogle Scholar
  12. 12.
    Zhou QF, Zhang QQ, Yoshimura T, Trolier-McKinstry S (2003) Appl Phys Lett 82:4767CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  1. 1.NIH Transducer Resource Center and Department of Biomedical EngineeringUniversity of Southern CaliforniaLos AngelesUSA
  2. 2.Chemat Technology Inc.NorthridgeUSA

Personalised recommendations