Journal of Materials Science

, Volume 42, Issue 8, pp 2678–2683 | Cite as

Effect of the oxygen pressure on the photoluminescence properties of ZnO thin films by PLD

  • X. M. Fan
  • J. S. Lian
  • Qing Jiang
  • ZuoWan Zhou


ZnO thin films on Si(111) substrate were deposited by laser ablation of Zn target in oxygen reactive atmosphere; Nd-YAG laser with wavelength of 1064 nm was used as laser source. The experiments were performed at laser energy density of 31 J/cm2, substrate temperature of 400 °C and various oxygen pressures (5–65 Pa). X-ray diffraction was applied to characterize the structure of the deposited ZnO films and the optical properties of the ZnO thin films were characterized by photoluminescence with an Ar ion laser as a light source using an excitation wavelength of 325 nm. The influence of the oxygen pressure on the structural and optical properties of ZnO thin films was investigated. It was found that ZnO film with random growth grains can be obtained under the condition of oxygen pressure 5–65 Pa. It will be clearly shown that the grain size and the formation of intrinsic defects depend on the oxygen partial pressure and that high optical quality of the ZnO films is obtained under low oxygen pressure (5 Pa, 11 Pa) conditions.


Oxygen Pressure Pulse Laser Deposition Green Emission Quantum Confinement Effect Laser Energy Density 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This work was supported by Foundation of National Key Basic Research and Development Program (No. 2004CB619301) and Project 985-automotive engineering of Jilin University.


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Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  • X. M. Fan
    • 1
    • 2
  • J. S. Lian
    • 2
  • Qing Jiang
    • 2
  • ZuoWan Zhou
    • 1
  1. 1.College of Materials EngineeringSouthwest Jiaotong UniversityChengduChina
  2. 2.Key Lab of Automobile Materials, Ministry of Education, College of Materials Science and EngineeringJilin UniversityChangchunChina

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