Twin quintuplet surfaces in CVD diamond
- 136 Downloads
Chemical vapor deposition (CVD) of diamond films and wafers is a well established and flexible technology in which deposition parameters control the deposition rate as well as diamond properties, quality and shape. This article deals with surface morphology and crystallography of wafers, with emphasis on twin blocks and twin quintuples. In the study described here we have determined surface facet crystallography of two diamond wafers groups, one that contains Σ3 twin blocks and the other that has a large population of twin quintuplets. The tool used for the study is a scanning electron microscope (SEM) and the technique to identify surface crystallography involves only accurate tilting and surface observation. A basic knowledge of the twin structure enables accurate determination of surface crystallography.
KeywordsTwin Boundary Diamond Film Chemical Vapor Deposition Diamond Facet Crystallography Surface Crystallography
The sponsorship of DARPA and NRL is greatly appreciated. My thanks are due to Norton Diamond and from Raytheon for their diamond wafers. I also appreciate the hospitality of NIST where this study was performed.