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Journal of Materials Science

, Volume 42, Issue 3, pp 941–947 | Cite as

Effect of plasma treatment on the microstructure and electrical properties of MIM capacitors with PECVD silicon oxide and silicon nitride

  • Chia-Cheng Ho
  • Bi-Shiou ChiouEmail author
Article

Abstract

Metal–insulator–metal (MIM) capacitors with plasma enhanced chemical vapor deposited (PECVD) nitride exhibit trap-induced dispersive behavior and electrical hysteresis, which lead to degradation in capacitor linearity at low frequencies. The dominant defect was suggested to be silicon dangling bonds originated from nitrogen deficiency. Previous methods to eliminate the dispersive behavior and electrical hysteresis include use of oxide–nitride–oxide (ONO) stacks and/or plasma pre-treatment of silicon substrate before nitride deposition [Van Huylenbroeck S, Decoutere S, Venegas R, Jenei S, Winderickx G (2002) IEEE Electron Device Lett 23:191; Lau WS (1990) Jpn J Appl Phys 29:L690]. In this study, the plasma post-treatment method was employed; MIM capacitors with PECVD oxide and nitride were treated with N2O and SiH4/NH3 plasma, respectively, after deposition of the dielectric layer. No apparent change in film microstructure is observed after plasma treatment. Plasma post-treatment is effective in eliminating the electrical hysteresis shift of the nitride capacitors. Fourier transform infrared (FTIR) absorption spectra suggest an increase of the Si–H bond after SiH4/NH3 plasma bombardment of the nitride films. Auger depth profiling indicates a slight increase of nitrogen to silicon ratio after plasma treatment. The increase of the Si–H bonds as well as the raise of nitrogen to silicon ratio are two possible causes for the elimination of the hysteresis shift of the plasma-treated nitride capacitors. The time dependent dielectric breakdown testing indicates a decrease in both the leakage current and the lifetime of the MIM capacitors treated with plasma. Possible dielectric degradation mechanism is explored.

Keywords

Plasma Treatment Plasma Enhance Chemical Vapor Deposition Nitride Film Silicon Nitride Film Auger Depth Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

This work is sponsored by National Science Council, Taiwan, under the contract number NSC 93-2216-E-009-023.

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Copyright information

© Springer Science+Business Media, Inc. 2006

Authors and Affiliations

  1. 1.Department of Electronics Engineering and Institute of ElectronicsNational Chiao Tung UniversityHsinchuChina
  2. 2.Innovative Packaging Research CenterNational Chiao Tung UniversityHsinchu, TaiwanP.R. China

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