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Journal of Materials Science

, Volume 42, Issue 3, pp 901–907 | Cite as

Structure, composition and electrical properties of YSZ films deposited by ultrasonic spray pyrolysis

  • E. B. Ramírez
  • A. Huanosta
  • J. P. Sebastian
  • L. Huerta
  • A. Ortiz
  • J. C. AlonsoEmail author
Article
First Online:

Abstract

Yttria-stabilized zirconia (YSZ) films with different yttria concentrations were prepared by ultrasonic spray pyrolysis on Si substrates at 525 °C, using solutions of zirconium and yttrium acetylacetonates in methanol. The chemical composition, structure and electrical properties of the films were studied by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and electrochemical impedance spectroscopy (EIS). XPS measurements show that the Y content in the films increases as the Y precursor in the solution increases. Carbon incorporation was also found in the films, although the concentration of this impurity was reduced as the incorporation of Y increased. XRD spectra show that the Zr1−xYxO2−x/2 polycrystalline films have the cubic phase of ZrO2 and fully stabilized 8YSZ (8 at.% Y2O3 + 92 at.% ZrO2), and that their lattice constant increases slightly as the Y content increases. The conductivity of all the as-deposited films as a function of temperature, showed an Arrhenius behavior, and with the exception of the film with the maximum Y content, the activation energies were in the range of 0.98–1.11 eV. The ionic conductivity of one of these films was similar to that measured for a pellet made of the 8YSZ standard powder.

Keywords

Y2O3 Yttrium Stabilize Zirconium Ultrasonic Spray Pyrolysis Y2O3 Content YSZ3 Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgements

The authors want to thank to L. Baños, J. Camacho and S. Jimenez for technical assistance. This work has been partially supported by DGAPA-UNAM under Project IN109803, and CONACyT-México, under Project 47303-F.

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Copyright information

© Springer Science+Business Media, Inc. 2006

Authors and Affiliations

  • E. B. Ramírez
    • 1
  • A. Huanosta
    • 1
  • J. P. Sebastian
    • 2
  • L. Huerta
    • 1
  • A. Ortiz
    • 1
  • J. C. Alonso
    • 1
    Email author
  1. 1.Instituto de Investigaciones en MaterialesUniversidad Nacional Autónoma de México, Ciudad UniversitariaMexicoMexico
  2. 2.Centro de Investigación en EnergíaUniversidad Nacional Autónoma de MéxicoTemixcoMexico

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