Journal of Materials Science

, Volume 42, Issue 3, pp 901–907 | Cite as

Structure, composition and electrical properties of YSZ films deposited by ultrasonic spray pyrolysis

  • E. B. Ramírez
  • A. Huanosta
  • J. P. Sebastian
  • L. Huerta
  • A. Ortiz
  • J. C. AlonsoEmail author


Yttria-stabilized zirconia (YSZ) films with different yttria concentrations were prepared by ultrasonic spray pyrolysis on Si substrates at 525 °C, using solutions of zirconium and yttrium acetylacetonates in methanol. The chemical composition, structure and electrical properties of the films were studied by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and electrochemical impedance spectroscopy (EIS). XPS measurements show that the Y content in the films increases as the Y precursor in the solution increases. Carbon incorporation was also found in the films, although the concentration of this impurity was reduced as the incorporation of Y increased. XRD spectra show that the Zr1−xYxO2−x/2 polycrystalline films have the cubic phase of ZrO2 and fully stabilized 8YSZ (8 at.% Y2O3 + 92 at.% ZrO2), and that their lattice constant increases slightly as the Y content increases. The conductivity of all the as-deposited films as a function of temperature, showed an Arrhenius behavior, and with the exception of the film with the maximum Y content, the activation energies were in the range of 0.98–1.11 eV. The ionic conductivity of one of these films was similar to that measured for a pellet made of the 8YSZ standard powder.


Y2O3 Yttrium Stabilize Zirconium Ultrasonic Spray Pyrolysis Y2O3 Content YSZ3 Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The authors want to thank to L. Baños, J. Camacho and S. Jimenez for technical assistance. This work has been partially supported by DGAPA-UNAM under Project IN109803, and CONACyT-México, under Project 47303-F.


  1. 1.
    Minh NQ (1993) J Am Ceram Soc 76:563CrossRefGoogle Scholar
  2. 2.
    Kozhukharov V, Brashkova N, Ivanova M, Carda J, Machkova M (2002) Bol Soc Esp Cerám Vidrio 41:471CrossRefGoogle Scholar
  3. 3.
    Mori T, Drennan J, Lee JH, Li JG, Ikegami T (2002) Solid State Ionics 154–155:529CrossRefGoogle Scholar
  4. 4.
    Ralph JM, Schoeller AC, M. Krumpelt (2001) J Mater Sci 36:1161CrossRefGoogle Scholar
  5. 5.
    Will J, Mitterdofer A, Kleinlogel C, Perednis D, Gauckler LJ (2000) Solid State Ionics 131:79CrossRefGoogle Scholar
  6. 6.
    Di Bartolomeo E, Kaabbuathong N, Grilli ML, Traversa E (2004) Solid State Ionics 171:173CrossRefGoogle Scholar
  7. 7.
    Bartolomé JF, Montero I, Díaz M, López-Esteban S, Moya JS, Deville S, Gremillard L, Chevalier J, Fantozzi G (2004) J Am Ceram Soc 87:2282CrossRefGoogle Scholar
  8. 8.
    Haering C, Roosen A, Schichl H (2005) Solid State Ionics 176:253CrossRefGoogle Scholar
  9. 9.
    Bao W, Zhu W, Zhu G, Gao J, Meng G (2005) Solid State Ionics 176:669CrossRefGoogle Scholar
  10. 10.
    Yamamoto O, Arati Y, Takeda Y, Imanishi N, Mizutani Y, Kawai M, Nakmura Y (1995) Solid State Ionics 79:137CrossRefGoogle Scholar
  11. 11.
    Boulc´h F, Dessemond L, Djurado E (2002) Solid State Ionics 154–155:143CrossRefGoogle Scholar
  12. 12.
    Hartmanová M, Thurzo I, Jergel M, Bartos J, Kadlec F, Zelezný V, Tunega D, Kundracik F, Chromik S, Brunel M (1998) J Mater Sci 33:969CrossRefGoogle Scholar
  13. 13.
    Wanzenberg E, Tietz F, Panjan P, Stöver D (2003) Solid State Ionics 159:1CrossRefGoogle Scholar
  14. 14.
    Wanzenberg E, Tietz F, Kek D, Panjan P, Stöver D (2003) Solid State Ionics 164:121CrossRefGoogle Scholar
  15. 15.
    Ruddell DE, Stoner BR, Thompson JY (2003) Thin Sold Films 445:14CrossRefGoogle Scholar
  16. 16.
    Chevalier S, Kilo M, Borchardt G, Larpin JP (2003) Appl Surf Sci 205:188CrossRefGoogle Scholar
  17. 17.
    Meng G, Song H, Dong Q, Peng D (2004) Solid State Ionics 175:29CrossRefGoogle Scholar
  18. 18.
    Chiodelli G, Magistris A, Scagliotti M, Parmigiani F (1988) J Mater Sci 23:1159CrossRefGoogle Scholar
  19. 19.
    Perednis D, Gaucker LJ (2004) Solid State Ionics 166:229CrossRefGoogle Scholar
  20. 20.
    Kosacki I, Rouleau CM, Becher PF, Bentley J, Lowndes DH (2005) Solid State Ionics 176:1319CrossRefGoogle Scholar
  21. 21.
    Langlet M, Joubert JC (1993) In: Rao CNR (ed) Chemistry of advanced materials. Blackwell Scientific Publications, Oxford, pp 55–79Google Scholar
  22. 22.
    Ortiz A, Alonso JC, Pankov V, Andrade E, Urbiola C (2001) J Electrochem Soc 148:F26CrossRefGoogle Scholar
  23. 23.
    Ortiz A, Alonso JC (2002) J Mater Sci Mater Electron 13:7CrossRefGoogle Scholar
  24. 24.
    Catañeda L, Alonso JC, Ortiz A, Andrade E, Saniger JM, Bañuelos JG (2002) Mater Chem Phys 77:938CrossRefGoogle Scholar
  25. 25.
    Ortiz A, Alonso JC, Haro-Ponoatowski E (2005) J Electron Mater 34:150CrossRefGoogle Scholar
  26. 26.
    Keijser TH, Langford JI, Mittemeijer EJ, Vogels ABP (1982) J Appl Cryst 15:308CrossRefGoogle Scholar
  27. 27.
    Valvoda V (1992) In: Eckertová L, Ruzicka T (eds) Diagnostics and applications of thin films. IOP Publishing, London, pp 115–132Google Scholar
  28. 28.
    Zhang NL, Song ZT, Wan Q, Shen QW, Lin CL (2002) Appl Surf Sci 202:126CrossRefGoogle Scholar
  29. 29.
    Wang SJ, Ong CK (2002) Appl Phys Lett 80:2541CrossRefGoogle Scholar
  30. 30.
    Hughes AE, Sexton BA (1989) J Mater Sci 24:1057CrossRefGoogle Scholar
  31. 31.
    Nasibulin AG, Shurgina LI, Kauppinen EI (2005) Colloid J 67:1CrossRefGoogle Scholar
  32. 32.
    Jiang SP, Love JG, Badwal SPS (1997) In: Nowotny J, Sorrell CC (eds) Key Engineering Materials, vol 125–126. Trans Tech Publications, Switzerland, pp 133–162Google Scholar

Copyright information

© Springer Science+Business Media, Inc. 2006

Authors and Affiliations

  • E. B. Ramírez
    • 1
  • A. Huanosta
    • 1
  • J. P. Sebastian
    • 2
  • L. Huerta
    • 1
  • A. Ortiz
    • 1
  • J. C. Alonso
    • 1
    Email author
  1. 1.Instituto de Investigaciones en MaterialesUniversidad Nacional Autónoma de México, Ciudad UniversitariaMexicoMexico
  2. 2.Centro de Investigación en EnergíaUniversidad Nacional Autónoma de MéxicoTemixcoMexico

Personalised recommendations