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Journal of Electroceramics

, 23:356 | Cite as

Electrical and optical studies of transparent conducting ZnO:Al thin films by magnetron dc sputtering

  • Vinh Ai Dao
  • Tran Le
  • Tuan Tran
  • Huu Chi Nguyen
  • Kyunghae Kim
  • Jaehyeong Lee
  • Sungwook Jung
  • N. Lakshminarayan
  • Junsin YiEmail author
Article

Abstract

Transparent conducting aluminium-doped Zinc oxide (ZnO:Al) films have been deposited on glass substrates by magnetron dc sputtering using a ceramic target (ZnO with 2 wt% Al2O3). The dependence of the electrical and optical properties of these films on substrate temperature, sputtering pressure of Ar and location of substrates were investigated in detail. Target is perpendicular with substrate and we controlled the distance ‘x’ of target and substrate. Optimized films with resistivity of 3.7 × 10−4 Ω cm, an average transmission in the visible range (300–800 nm) of greater than 85% and the reflectance in the infrared range being greater than 85% have been formed. Substrate temperature, distance ‘x’, and working pressure are optimized for lower resistivity and high concentration of carriers.

Keywords

Transparent conductive oxide films Energetic oxygen atoms ZnO:Al 

Notes

Acknowledgement

This research was supported by the Ministry of Information and Communication (MIC), Korea, under the IT Foreign Specialist Inviting Program (ITFSIP) supervised by the Institute of Information Technology Advancement (IITA).

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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Vinh Ai Dao
    • 1
  • Tran Le
    • 2
  • Tuan Tran
    • 2
  • Huu Chi Nguyen
    • 2
  • Kyunghae Kim
    • 1
  • Jaehyeong Lee
    • 3
  • Sungwook Jung
    • 1
  • N. Lakshminarayan
    • 1
    • 4
  • Junsin Yi
    • 1
    Email author
  1. 1.Information Communication Device LabSungkyunkwan UniversitySuwonSouth Korea
  2. 2.Ho Chi Minh City University of Natural SciencesHo Chi Minh CityVietnam
  3. 3.Electronics and Information EngineeringKunsan National UniversityGunsanSouth Korea
  4. 4.Department of PhysicsMadras Christian CollegeChennaiIndia

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