Two-dimensional optical scanning of a piezoelectric cantilever actuator
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A piezoelectric optical scanning cantilever structure with two-dimensional scanning angles was reported. The theoretical and experimental studies on the structure were carried out. By using finite element method, the effect of the materials and the structure size on the theoretical results were concluded, and a favorable two-dimensional piezoelectric optical scanning structure with a single cantilever was obtained. A two-dimensional piezoelectric optical scanning specimen was fabricated. It was found that a 0.282° bending scanning angle at 1056 Hz and a 0.12° torsional scanning angle at 4612 Hz were obtained under the forcing voltage of 5 V (o–p).
KeywordsTwo-dimensional optical scanning structure Structural optimization Scanning frequency Forcing voltage Scanning angle Flatness of the reflecting mirror
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