Temperature-Dependent Thermal Boundary Conductance at Al/Al2O3 and Pt/Al2O3 interfaces
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With the ever-decreasing size of microelectronic devices, growing applications of superlattices, and development of nanotechnology, thermal resistances of interfaces are becoming increasingly central to thermal management. Although there has been much success in understanding thermal boundary conductance at low temperatures, the current models applied at temperatures more common in device operation are not adequate due to our current limited understanding of phonon transport channels. In this study, the scattering processes in Al and Pt films on Al2O3 substrates are examined by transient thermoreflectance testing at high temperatures. At high temperatures, traditional models predict the thermal boundary conductance to be relatively constant in these systems due to assumptions about phonon elastic scattering. Experiments, however, show an increase in the conductance indicating potential inelastic phonon processes.
KeywordsDiffuse mismatch model Elastic scattering Inelastic scattering Phonon Phonon radiation limit Thermal boundary conductance
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- 5.Phelan P.E. (1998). J. Heat Transfer 120: 37 Google Scholar
- 6.Chen G., Tien C.L., Wu X., Smith J.S. (1994). J. Heat Transfer 116: 325 Google Scholar
- 11.The term “acoustic mismatch” describes two materials that have significantly different acoustic velocities; the degree of the acoustic mismatch can be easily determined by comparing the materials’ Debye temperatures, θ D Google Scholar
- 14.R.J. Stevens, L.V. Zhigilei, P.M. Norris, Int. J. Heat Mass Transfer (in press)Google Scholar
- 17.Cahill D.G., Bullen A., Lee S.-M. (2000). High Temp.-High Press. 32: 135 Google Scholar
- 18.Kittel C. (1996). Introduction to Solid State Physics, 7th edn. John Wiley and Sons Inc., New York Google Scholar
- 25.Gray D.E. (1972). American Institute of Physics Handbook, 3rd edn. McGraw Hill, New York Google Scholar