Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process

  • Mehrab Ramzan
  • Talha Masood Khan
  • Sami Bolat
  • Mehmet Ali Nebioglu
  • Hakan Altan
  • Ali Kemal Okyay
  • Kagan Topalli


This paper presents terahertz (THz) frequency selective surfaces (FSS) implemented on glass substrate using standard microfabrication techniques. These FSS structures are designed for frequencies around 0.8 THz. A fabrication process is proposed where a 100-μm-thick glass substrate is formed through the HF etching of a standard 500-μm-thick low cost glass wafer. Using this fabrication process, three separate robust designs consisting of single-layer FSS are investigated using high-frequency structural simulator (HFSS). Based on the simulation results, the first design consists of a circular ring slot in a square metallic structure on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of approximately 0.07 THz, which remains nearly constant till 30° angle of incidence. The second design consists of a tripole structure on top of a 100-μm-thick Pyrex glass substrate with 65% transmission bandwidth of 0.035 THz, which remains nearly constant till 30° angle of incidence. The third structure consists of a triangular ring slot in a square metal on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of 0.051 THz, which remains nearly constant up to 20° angle of incidence. These designs show that the reflections from samples can be reduced compared to the conventional sample holders used in THz spectroscopy applications, by using single layer FSS structures manufactured through a relatively simple fabrication process. Practically, these structures are achieved on a fabricated 285-μm-thick glass substrate. Taking into account the losses and discrepancies in the substrate thickness, the measured results are in good agreement with the electromagnetic simulations.


Frequency selective surfaces Bandpass filters Periodic structures Metamaterials Microfabrication HF etching Pyrex glass Terahertz 


  1. 1.
    P. H. Siegel, "Terahertz technology," IEEE Transactions on Microwave Theory and Techniques, 50, 3, pp. 910–928, 2002.Google Scholar
  2. 2.
    Y. Sun, M. Y. Sy, Y. -X. J. Wang, A. T. Ahuja and Y. T. Zhang, "A promising diagnostic method: Terahertz pulsed imaging and spectroscopy," World Journal of W J R Radiology, pp. 55-65, 2011Google Scholar
  3. 3.
    M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Clu, A. J. Fitzgerald and W. R. Tribe, "Security applications of terahertz technology," Proc. of SPIE, 50, 3, pp. 44-52, 2003.Google Scholar
  4. 4.
    T. W. Crowe, T. Globus, D. L. Woolard and J. L. Hesler, "Terahertz sources and detectors and their application to biological sensing," Philosophical Transactions: Mathematical, Physical and Engineering Sciences, 362, 1815, pp. 365-377, 2004.Google Scholar
  5. 5.
    A. Redo-Sanchez and X. -C. Zhang, "Terahertz science and technology trends," IEEE Journal of Selected Topics in Quantum Electronics, 14, 2, pp. 260-269, March 2008.Google Scholar
  6. 6.
    C. Corsi and F. Sizov, THz and Security Applications: Detectors, Sources and Associated Electronics, Springer, 2014.Google Scholar
  7. 7.
    H.-B. Liu, H. Zhong, N. Karpowicz, Y. Chen and X.-C. Zhang, "Terahertz spectroscopy and Imaging for defense and security applications," Proceedings of the IEEE, 95, 8, pp. 1514-1527, August 2007.Google Scholar
  8. 8.
    P. H. Siegel, "Terahertz technology in biology and medicine," IEEE Transactions on Microwave Theory And Techniques, 52, 10, pp. 2438-2447, 2004.Google Scholar
  9. 9.
    M. Naftaly and R. E. Miles, "Terahertz Time-Domain Spectroscopy for Material Characterization," Proceedings of the IEEE, 95, 8, August 2007.Google Scholar
  10. 10.
    V. Sanphuang, W. G. Yeo, J. L. Volakis and N. K. Nahar, "THz transparent metamaterials for enhanced spectroscopic and imaging measurements," IEEE Transactions on Terahertz Science And Technology, 5, pp. 117-122, January 2015.Google Scholar
  11. 11.
    E. Bründermann, H. -W. Hübers and M. F. Kimmitt, Terahertz Techniques, Springer, 2012.Google Scholar
  12. 12.
    G. Chattopadhyay, "Technology, Capabilities, and Performance of Low Power Terahertz Sources," IEEE Transactions on Terahertz Science and Technology, 1, 1, September 2011.Google Scholar
  13. 13.
    S. Vegesna, Y. Zhu, A. Bernussi and M. Saed, "Terahertz two-layer frequency selective surfaces with improved transmission characteristics," IEEE Transactions on Terahertz Science And Technology, 2, pp. 441-448, July 2012.Google Scholar
  14. 14.
    B. A. Munk, Frequency selective surfaces theory and design, John Wiley & Sons, 2000.Google Scholar
  15. 15.
    T. Wu, Frequency selective surface and grid array, John Wiley & Sons, 1995.Google Scholar
  16. 16.
    R. Dickie, R. Cahill, V. Fusco, H. S. Gamble and N. Mitchell, "THz Frequency Selective Surface Filters for Earth Observation Remote Sensing Instruments," IEEE Transactions On Terahertz Science and Technology, 1, 2, November 2011.Google Scholar
  17. 17.
    D. S. Wang, B. J. Chen and C. H. Chan, "High-Selectivity Bandpass Frequency-Selective Surface in Terahertz Band," IEEE Transactions on Terahertz Science and Technology, 6, 2, March 2016.Google Scholar
  18. 18.
    A. Ebrahimi, S. Nirantar, W. Withayachumnankul, M. Bhaskaran, S. Sriram, S. F. Al-Sarawi and D. Abbott, "Second-Order Terahertz Bandpass Frequency Selective Surface With Miniaturized Elements," IEEE Transaction on Terahertz Science And Technology, 5, 5, September 2015.Google Scholar
  19. 19.
    S. M. A. M. H. Abadi, M. Li, and N. Behdad, "Harmonic-Suppressed Miniaturized-Element Frequency Selective Surfaces With Higher Order Bandpass Responses," IEEE Transactions on Antennas and Propagation, 62, 5, May 2014.Google Scholar
  20. 20.
    Ansoft, user’s guide – High Frequency Structure Simulator, Ansoft Corporation, 2005.Google Scholar

Copyright information

© Springer Science+Business Media New York 2017

Authors and Affiliations

  1. 1.Department of Electrical and Electronics EngineeringBilkent UniversityAnkaraTurkey
  2. 2.UNAM-Institute of Materials Science and NanotechnologyBilkent UniversityAnkaraTurkey
  3. 3.Department of PhysicsMiddle East Technical UniversityAnkaraTurkey
  4. 4.TUBITAK Space Technologies Research InstituteAnkaraTurkey

Personalised recommendations