Fabricating Microbolometer Array on Unplanar Readout Integrated Circuit

  • Hongchen Wang
  • Xinjian Yi
  • Jianjun Lai
  • Yi Li
Original Article


In this paper, the integration of an experimental 32 × 32 uncooled IR microbolometer array with an unplanar CMOS Readout Integrated Circuit (ROIC) is presented. A vanadium oxide film fabricated by low temperature reactive ion beam sputtering is utilized as thermal-sensitive material in the bolometric detectors Before the integration, the unplanar ROIC for commercial use is first planarized by bisbenzocyclobutene film, then a electroless nickel-plating on ohmic contact areas is accomplished. Finally the bolometer array is fabricated using a micromachining process, which is completely compatible with CMOS technology. Measurements and calculations for the as-fabricated samples show that the responsivity of 1.4 × 104 V/W and the detectivity of 2.1 × 108cmHz1/2W−1 and a thermal response time of 10ms are obtained at a pulse bias of IV.

Key words:

Microbolometer array readout integrated circuit uncooled infrared detection vanadium oxide thin film 


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Copyright information

© Springer Science+Business Media, Inc. 2005

Authors and Affiliations

  • Hongchen Wang
    • 1
  • Xinjian Yi
    • 1
    • 3
  • Jianjun Lai
    • 1
  • Yi Li
    • 1
    • 2
  1. 1.Department of Optoelectronic EngineerHuazhong University of Science & TechnologyWuhanChina
  2. 2.The National Laboratory for OptoelectronicsWuhanChina
  3. 3.The Key Laboratory of Education Ministry for Imaging Recognization and Intelligence ControlHuazhong University of Science and TechnologyWuhanChina

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