Czechoslovak Journal of Physics

, Volume 56, Supplement 2, pp B1364–B1370 | Cite as

Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge

  • V. Straňák
  • P. Adámek
  • J. Blažek
  • P. Špatenka
  • Z. Hubička
  • M. Tichý
  • R. Hippler
  • S. Wrehde
Article

Abstract

Unbalanced DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics.We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, electron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure.

Key words

pulsed magnetron time resolved measurements Langmuir probe 

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Copyright information

© Institute of Physics, Academy of Sciences of Czech Republic 2006

Authors and Affiliations

  • V. Straňák
    • 1
  • P. Adámek
    • 1
  • J. Blažek
    • 1
  • P. Špatenka
    • 1
  • Z. Hubička
    • 2
  • M. Tichý
    • 3
  • R. Hippler
    • 4
  • S. Wrehde
    • 4
  1. 1.Department of PhysicsUniversity of South BohemiaČeské BudějoviceCzech Republic
  2. 2.Institute of PhysicsAcademy of Science of the Czech RepublicPragueCzech Republic
  3. 3.Faculty of Mathematics and PhysicsCharles University in PraguePrague 8Czech Republic
  4. 4.Institute of PhysicsUniversity of GreifswaldGreifswaldGermany

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