Biomedical Microdevices

, 19:86 | Cite as

All-in-one low-intensity pulsed ultrasound stimulation system using piezoelectric micromachined ultrasonic transducer (pMUT) arrays for targeted cell stimulation

  • Wonjun Lee
  • Seungjun Yoo
  • Joontaek Jung
  • Woojin Kang
  • Wei Wang
  • Cheil Moon
  • Hongsoo ChoiEmail author


A novel cell-stimulation system was fabricated using 10 × 29 piezoelectric micromachined ultrasonic transducer (pMUT) arrays for targeted ultrasonic cell stimulation. Both the diameter of a single pMUT element and the edge-to-edge gap were 120 μm, and the size of a pMUT array was 2.27 × 6.84 mm, to be placed at the bottom of a Transwell. The measured resonance frequency of a single pMUT element was 1.48 ± 0.13 MHz and the measured acoustic intensity of the pMUT array was 0.15 ± 0.03 MPa at 1 mm away from the transducer. A pMUT array was mounted on a print circuit board (PCB), which was designed in accordance with the size of a 12-well Transwell. The Transwell was placed on the PCB and wire bonding was performed to electrically connect the PCB and pMUT arrays. After wiring, the PCB and pMUT arrays were coated with 2.6-μm thick parylene-C to ensure biocompatibility and waterproofing. PC12 cells were used for ultrasonic cell stimulation tests to examine the proposed all-in-one low-intensity pulsed ultrasound stimulation system. Various stimulation times and duty cycles were used simultaneously for cell proliferation in a confined cell culture environment. All stimulation groups showed increased cell proliferation rates, in the range 138–166%, versus the proliferation rate of the control group.


Ultrasonic transducer Cell stimulation system pMUT Proliferation 



This work was supported by the DGIST R&D Program of the Ministry of Science, ICT and Future Planning of Korea (NO. 17-BD-0404) and by the Civil & Military Technology Cooperation Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (NO. 2014M3C1A9060874 and 2017K1A1A2013237).


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Copyright information

© Springer Science+Business Media, LLC 2017

Authors and Affiliations

  • Wonjun Lee
    • 1
    • 2
  • Seungjun Yoo
    • 3
  • Joontaek Jung
    • 1
    • 2
  • Woojin Kang
    • 1
    • 2
  • Wei Wang
    • 4
  • Cheil Moon
    • 3
  • Hongsoo Choi
    • 1
    • 2
    Email author
  1. 1.Department of Robotics EngineeringDaegu Gyeongbuk Institute of Science & TechnologyDaeguSouth Korea
  2. 2.DGIST-ETH Microrobot Research CenterDaegu Gyeongbuk Institute of Science & TechnologyDaeguSouth Korea
  3. 3.Department of Brain & Cognitive SciencesDaegu Gyeongbuk Institute of Science & TechnologyDaeguSouth Korea
  4. 4.Institute of MicroelectronicsPeking UniversityBeijingPeople’s Republic of China

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