Novel multi-sided, microelectrode arrays for implantable neural applications

John P. Seymour; Nick B. Langhals; David J. Anderson; Daryl R. Kipke

doi:10.1007/s10544-011-9512-z

Biomedical Microdevices

June 2011, Volume 13, Issue 3, pp 441–451

Novel multi-sided, microelectrode arrays for implantable neural applications

Authors
Authors and affiliations

John P. SeymourEmail author
Nick B. Langhals
David J. Anderson
Daryl R. Kipke

Article

First Online:: 08 February 2011

DOI: 10.1007/s10544-011-9512-z

Cite this article as:: Seymour, J.P., Langhals, N.B., Anderson, D.J. et al. Biomed Microdevices (2011) 13: 441. doi:10.1007/s10544-011-9512-z

46 Citations
1 Shares
792 Downloads

Abstract

A new parylene-based microfabrication process is presented for neural recording and drug delivery applications. We introduce a large design space for electrode placement and structural flexibility with a six mask process. By using chemical mechanical polishing, electrode sites may be created top-side, back-side, or on the edge of the device having three exposed sides. Added surface area was achieved on the exposed edge through electroplating. Poly(3,4-ethylenedioxythiophene) (PEDOT) modified edge electrodes having an 85-μm² footprint resulted in an impedance of 200 kΩ at 1 kHz. Edge electrodes were able to successfully record single unit activity in acute animal studies. A finite element model of planar and edge electrodes relative to neuron position reveals that edge electrodes should be beneficial for increasing the volume of tissue being sampled in recording applications.

Keywords

Neural recording Microelectrode array Parylene Neural prostheses Drug delivery Chemical mechanical polishing

Supplementary material

10544_2011_9512_MOESM1_ESM.jpg (423 kb)

Supplemental Fig. 1Electric potential slices and geometries from a three-dimensional COMSOL 4.0a model for each combination of neuron position and electrode type. Electric potential (V) shown in xy-plane cutting through the electrode. (a) Planar electrode. (b) Thin edge electrode, 0.5 μm thick. (c) Thick edge electrode, 5.0 μm thick. (JPEG 423 kb)

References

M.R. Abidian, D.C. Martin, Experimental and theoretical characterization of implantable neural microelectrodes modified with conducting polymer nanotubes. Biomaterials 29(9), 1273–1283 (2008)CrossRefGoogle Scholar
D.J. Anderson, K.G. Oweiss, et al. (2001). Sensor arrays in the micro-environment of the brain. Acoustics, Speech, and Signal Processing, 2001. Proceedings. (ICASSP '01). 2001 IEEE International Conference on Salt Lake City, UT, USA
G. Buzsaki, Large-scale recording of neuronal ensembles. Nat. Neurosci. 7(5), 446–451 (2004)CrossRefGoogle Scholar
H.-Y. Chen, A.A. McClelland et al., Solventless adhesive bonding using reactive polymer coatings. Anal. Chem. 80(11), 4119–4124 (2008)CrossRefGoogle Scholar
K.C. Cheung, Implantable microscale neural interfaces. Biomed. Microdevices 9(6), 923–938 (2007)CrossRefGoogle Scholar
C.-C. Chiang, M.-C. Chen et al., Physical and barrier properties of plasma-enhanced chemical vapor deposited -SiC:H films from trimethylsilane and tetramethylsilane. Jpn J. Appl. Phys. 1 Regular Pap. Short Notes Rev. Pap. 42(Compendex), 4273–4277 (2003)Google Scholar
S.F. Cogan, Neural stimulation and recording electrodes. Annu. Rev. Biomed. Eng. 10, 275–309 (2008)CrossRefGoogle Scholar
S.F. Cogan, D.J. Edell et al., Plasma-enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating. J. Biomed. Mater. Res. A 67(Compendex), 856–867 (2003)CrossRefGoogle Scholar
X. Cui, D.C. Martin, Electrochemical deposition and characterization of poly(3, 4-ethylenedioxythiophene) on neural microelectrode arrays. Sens. Actuators, B B89(1–2), 92–102 (2003)CrossRefGoogle Scholar
J.P. Donoghue, A. Nurmikko et al., Assistive technology and robotic control using motor cortex ensemble-based neural interface systems in humans with tetraplegia. J. Physiol. 579(Pt 3), 603–611 (2007)CrossRefGoogle Scholar
W.F. Gorham, A New General Synthetic Method for Preparation of Linear Poly-P-Xylylenes. J. Polym. Sci. Part 1 Polym. Chem. 4(12PA), 3027-& (1966)Google Scholar
H. Haug, Brain sizes, surfaces, and neuronal sizes of the cortex cerebri: a stereological investigation of man and his variability and a comparison with some mammals (primates, whales, marsupials, insectivores, and one elephant). Am. J. Anat. 180(2), 126–142 (1987)CrossRefGoogle Scholar
K. Hyoung-Gyun, A. Yoo-Min et al., Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide. Jpn. J. Appl. Phys., Part 1 (Regular Papers, Short Notes & Review Papers) 39(Copyright 2000, IEE), 1085–1090 (2000)Google Scholar
X. Jun, Y. Xing et al., Surface micromachined leakage proof Parylene check valve (IEEE, Piscataway, 2001)Google Scholar
S. Kim, R. Bhandari et al., Integrated wireless neural interface based on the Utah electrode array. Biomed Microdevices (2008)
D.R. Kipke, W. Shain et al., Advanced neurotechnologies for chronic neural interfaces: new horizons and clinical opportunities. J. Neurosci. 28(46), 11830–11838 (2008)CrossRefGoogle Scholar
D. Klee, N. Weiss et al., Vapor-Based Polymerization of Functionalized [2.2]Paracyclophanes: A Unique Approach Towards Surface-Engineered Microenvironments. Modern Cyclophane Chemistry. (Weinheim, Wiley-VCH, 2004): p.463
J. Lahann, D. Klee et al., Chemical vapour deposition polymerization of substituted [2.2]paracyclophanes. Macromol. Rapid Commun. 19(9), 441–445 (1998)CrossRefGoogle Scholar
E.R. Lewis, Using electronic circuits to model simple neuroelectric interactions. Proc. IEEE 56(6), 931–949 (1968)CrossRefGoogle Scholar
J.S. Lewis, M.S. Weaver, Thin-film permeation-barrier technology for flexible organic light-emitting devices. IEEE J. Sel. Top. Quantum Electron. 10(Copyright 2004, IEE), 45-57 (2004)Google Scholar
W. Li, D. Rodger et al., Integrated Flexible Ocular Coil for Power and Data Transfer in Retinal Prostheses. Conf Proc IEEE Eng Med Biol Soc 1(1), 1028–1031 (2005)Google Scholar
G.E. Loeb, M.J. Bak et al., Parylene as a Chronically Stable, Reproducible Microelectrode Insulator. IEEE Trans. Biomed. Eng. 24(2), 121–128 (1977)CrossRefGoogle Scholar
N.K. Logothetis, C. Kayser et al., In vivo measurement of cortical impedance spectrum in monkeys: implications for signal propagation. Neuron 55(5), 809–823 (2007)CrossRefGoogle Scholar
K.A. Ludwig, R. Miriani et al. Employing a Common Average Reference to Improve Cortical Neuron Recordings from Microelectrode Arrays. J. Neurophysiol. (2008)
K.A. Ludwig, J.D. Uram et al., Chronic neural recordings using silicon microelectrode arrays electrochemically deposited with a poly(3, 4-ethylenedioxythiophene) (PEDOT) film. J. Neural Eng. 3(1), 59–70 (2006)CrossRefGoogle Scholar
J.U. Meyer, T. Stieglitz et al., High density interconnects and flexible hybrid assemblies for active biomedical implants. IEEE Trans. Adv. Packag. 24(3), 366–374 (2001)CrossRefGoogle Scholar
M.A. Moffitt, C.C. McIntyre, Model-based analysis of cortical recording with silicon microelectrodes. Clin. Neurophysiol. 116(9), 2240–2250 (2005)CrossRefGoogle Scholar
H. Nandivada, H.Y. Chen et al., Vapor-based synthesis of poly [(4-formyl-p-xylylene)-co-(p-xylylene)] and its use for biomimetic surface modifications. Macromol. Rapid Commun. 26(22), 1794–1799 (2005)CrossRefGoogle Scholar
D.P. Papageorgiou, S.E. Shore et al., A shuttered neural probe with on-chip flowmeters for chronic in vivo drug delivery. J. Microelectromechanical Syst. 15(4), 1025–1033 (2006)CrossRefGoogle Scholar
E. Pierstorff, R. Lam et al., Nanoscale architectural tuning of parylene patch devices to control therapeutic release rates. Nanotechnology 19(44), 445104 (2008)CrossRefGoogle Scholar
N. Pornsin-Sirirak, M. Liger et al., Flexible parylene-valved skin for adaptive flow control (IEEE, Piscataway, 2002)Google Scholar
E. Purcell, J. Seymour et al. In vivo evaluation of a neural stem cell-seeded probe. Journal of Neural Engineering (In Press) (2009)
R. Rafaela Fernanda Carvalhal, F. Sanches, T.K. Lauro, Polycrystalline Gold Electrodes: A Comparative Study of Pretreatment Procedures Used for Cleaning and Thiol Self-Assembly Monolayer Formation. Electroanalysis 17(14), 1251–1259 (2005)CrossRefGoogle Scholar
R. Redd, M.A. Spak et al. Lithographic process for high-resolution metal lift-off, SPIE (1999)
J. Riera, T. Ogawa et al., Concurrent observations of astrocytic Ca(2+) activity and multisite extracellular potentials from an intact cerebral cortex. J Biophotonics (2009)
E.M. Robinson, R. Lam et al., Localized therapeutic release via an amine-functionalized poly-p-xylene microfilm device. J. Phys. Chem. B 112(37), 11451–11455 (2008)CrossRefGoogle Scholar
D.C. Rodger, Y.C. Tai, Microelectronic packaging for retinal prostheses. IEEE Eng. Med. Biol. Mag. 24(5), 52–57 (2005)CrossRefGoogle Scholar
J.P. Seymour, Y.M. Elkasabi et al., The insulation performance of reactive parylene films in implantable electronic devices. Biomaterials 30(31), 6158–6167 (2009)CrossRefGoogle Scholar
J.P. Seymour, D.R. Kipke, Neural probe design for reduced tissue encapsulation in CNS. Biomaterials 28(25), 3594–3607 (2007)CrossRefGoogle Scholar
A.K. Sharma, H. Yasuda, Effect of glow discharge treatment of substrates on parylene-substrate adhesion. J. Vacuum Sci. Technol. 21(4), 994–998 (1982)CrossRefGoogle Scholar
N.F. Sheppard, D.R. Day et al., Microdielectrometry. Sensors Actuators 2(3), 263–274 (1982)Google Scholar
A.J. Spence, K.B. Neeves et al., Flexible multielectrodes can resolve multiple muscles in an insect appendage. J. Neurosci. Meth. 159(1), 116–124 (2007)CrossRefGoogle Scholar
W.C. Stacey, B. Litt, Technology insight: neuroengineering and epilepsy-designing devices for seizure control. Nat. Clin. Pract. Neurol. 4(4), 190–201 (2008)Google Scholar
S. Takeuchi, D. Ziegler et al., Parylene flexible neural probes integrated with microfluidic channels. Lab Chip 5(5), 519–523 (2005)CrossRefGoogle Scholar
E.P.M. van Westing, G.M. Ferrari et al., Determination of coating performance using electrochemical impedance spectroscopy. Electrochim. Acta 39(7), 899–910 (1994)CrossRefGoogle Scholar
R.J. Vetter, J.C. Williams et al., Chronic neural recording using silicon-substrate microelectrode arrays implanted in cerebral cortex. IEEE Trans. Biomed. Eng. 51(6), 896–904 (2004)CrossRefGoogle Scholar
M.S. Weaver, L.A. Michalski et al. Organic light-emitting devices with extended operating lifetimes on plastic substrates. Appl. Phys. Lett. 81(Copyright 2002, IEE), 2929-2931 (2002)Google Scholar
K.D. Wise, Silicon microsystems for neuroscience and neural prostheses. IEEE Eng. Med. Biol. Mag. 24(5), 22–29 (2005)CrossRefGoogle Scholar
K.D. Wise, A.M. Sodagar et al., Microelectrodes, microelectronics, and implantable neural microsystems. Proc. IEEE 96(7), 1184–1202 (2008)CrossRefGoogle Scholar
D.S. Wuu, W.C. Lo et al., Plasma-deposited silicon oxide barrier films on polyethersulfone substrates: temperature and thickness effects. Surf. Coat. Technol. 197(Copyright 2006, IEE), 253-259 (2005)Google Scholar
G.R. Yang, Y.P. Zhao et al., Chemical-mechanical polishing of parylene N and benzocyclobutene films. J. Electrochem. Soc. 144(9), 3249–3255 (1997)CrossRefGoogle Scholar
Y. Yang, S. Basu et al., Fabrication of well-defined PLGA scaffolds using novel microembossing and carbon dioxide bonding. Biomaterials 26(15), 2585–2594 (2005)CrossRefGoogle Scholar
H. Yasuda, B.H. Chun et al., Interface-engineered parylene C coating for corrosion protection of cold-rolled steel. Corrosion 52(3), 169–176 (1996)CrossRefGoogle Scholar
H. Yasuda, Q.S. Yu et al., Interfacial factors in corrosion protection: an EIS study of model systems. Prog. Org. Coat. 41(4), 273–279 (2001)CrossRefGoogle Scholar
J. Zeng, A. Aigner et al., Poly(vinyl alcohol) nanofibers by electrospinning as a protein delivery system and the retardation of enzyme release by additional polymer coatings. Biomacromolecules 6(3), 1484–1488 (2005)CrossRefGoogle Scholar

Copyright information

Authors and Affiliations

John P. Seymour
- 1
Email author
Nick B. Langhals
- 1
David J. Anderson
- 1
Daryl R. Kipke
- 1

1.Department of Electrical EngineeringUniversity of MichiganAnn ArborUSA

Personalised recommendations

Actions

Unlimited access to the full article
Instant download
Include local sales tax if applicable

Subscribe to Journal

Get Access to

Biomedical Microdevices

for the whole of 2017

Novel multi-sided, microelectrode arrays for implantable neural applications

Abstract

Keywords

Supplementary material

Copyright information

Authors and Affiliations

Personalised recommendations

Cookies