Biomedical Microdevices

, Volume 10, Issue 6, pp 891–897 | Cite as

On-chip coupling of electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry

  • Seung-min Park
  • Kelvin H. Lee
  • Harold G. CraigheadEmail author


We present the integration of a cyclo olefin copolymer microfluidic chip with electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry. The electrochemical pump, using electrolysis as an internal pressure source, was fabricated directly on the surface of the polymer chip. The triangular SU-8 emitter tip was fabricated on a glass wafer using standard photolithography. After release from the glass wafer, this tip was aligned to the microchannel and bonded between two polymer plates. The electrochemical pump and the electrospray tip were tested with electrospray ionization mass spectrometry. Mass spectrometry confirmed the stability of the electrochemical pump and the electrospray tip.


ESI-MS Polymer microfluidic chip Electrochemical pump SU-8 tip 



electrospray ionization-mass spectroscopy


cyclo olefin copolymer





The authors would like to thank Pei-yu Liao and Leila Choe for help with mass spectrometry analysis and Dr. Yanou Yang for help with overall discussion. The work was supported in part by the Nanobiotechnology Center (NBTC), an STC Program of the National Science Foundation under Agreement No. ECS-9876771 and by the Institute for the Study of Aging. The authors would appreciate access and use of the Cornell Nanoscale Science and Technology Facility (a member of the National Nanofabrication Users Network).


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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Seung-min Park
    • 1
  • Kelvin H. Lee
    • 2
  • Harold G. Craighead
    • 1
    Email author
  1. 1.School of Applied and Engineering PhysicsCornell UniversityIthacaUSA
  2. 2.Department of Chemical EngineeringUniversity of DelawareNewarkUSA

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