Advertisement

Biomedical Microdevices

, Volume 10, Issue 6, pp 891–897 | Cite as

On-chip coupling of electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry

  • Seung-min Park
  • Kelvin H. Lee
  • Harold G. CraigheadEmail author
Article

Abstract

We present the integration of a cyclo olefin copolymer microfluidic chip with electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry. The electrochemical pump, using electrolysis as an internal pressure source, was fabricated directly on the surface of the polymer chip. The triangular SU-8 emitter tip was fabricated on a glass wafer using standard photolithography. After release from the glass wafer, this tip was aligned to the microchannel and bonded between two polymer plates. The electrochemical pump and the electrospray tip were tested with electrospray ionization mass spectrometry. Mass spectrometry confirmed the stability of the electrochemical pump and the electrospray tip.

Keywords

ESI-MS Polymer microfluidic chip Electrochemical pump SU-8 tip 

Abbreviation

ESI-MS

electrospray ionization-mass spectroscopy

COC

cyclo olefin copolymer

PDMS

Polydimethylsiloxane

Notes

Acknowledgements

The authors would like to thank Pei-yu Liao and Leila Choe for help with mass spectrometry analysis and Dr. Yanou Yang for help with overall discussion. The work was supported in part by the Nanobiotechnology Center (NBTC), an STC Program of the National Science Foundation under Agreement No. ECS-9876771 and by the Institute for the Study of Aging. The authors would appreciate access and use of the Cornell Nanoscale Science and Technology Facility (a member of the National Nanofabrication Users Network).

References

  1. S. Arscott, S. Le Gac, C. Druon, P. Tabourier, C.J. Rolando, Micromech. Microeng. 14, 310–316 (2004)CrossRefGoogle Scholar
  2. K.L. Aubin, J. Huang, S. Park, Y. Yang, M. Kondratovich, H.G. Craighead, J. Vac. Sci. Technol. B. 25, 1171–1174 (2007)CrossRefGoogle Scholar
  3. S. Böhm, B. Timmer, W. Olthuis, P. Bergveld, J. Micromechanics Microengineering 10, 498–504 (2000)CrossRefGoogle Scholar
  4. H.G. Craighead, Nature 442, 387–393 (2006)CrossRefGoogle Scholar
  5. J. Kameoka, R. Orth, B. Ilic, D. Czaplewski, T. Wachs, H.G. Craighead, Anal. Chem. 74, 5897–5901 (2002)CrossRefGoogle Scholar
  6. R.R. Lamonte, D. McNally, Plast. Eng. 56, 51–56 (2000)Google Scholar
  7. J.N. Lee, C. Park, G.M. Whitesides, Anal. Chem. 75, 6544–6554 (2003)CrossRefGoogle Scholar
  8. C. Li, Y. Yang, H.G. Craighead, K.H. Lee, Electrophoresis 26, 1800–1806 (2005)CrossRefGoogle Scholar
  9. P. Mayer, W.H.J. Vaes, J.L.M. Hermens, Anal. Chem. 72, 459–46 4 (2000)CrossRefGoogle Scholar
  10. A. Muck, A. Svatos, Rapid Commun. Mass Spectrom. 18, 1459–1464 (2004)CrossRefGoogle Scholar
  11. A. Muck, J. Wang, M. Jacobs, G. Chen, M.P. Chatrathi, V. Jurka, Z. Vyborny, S.D. Spillman, G. Sridharan, M.J. Schoning, Anal. Chem. 76, 2290–2297 (2004)CrossRefGoogle Scholar
  12. C.R. Neagu, J.G.E. Gardeniers, M. Elwenspoek, J.J.J. Kelly, Microelectromechanical Syst. 5, 2–9 (1996)CrossRefGoogle Scholar
  13. C.R. Neagu, J.G.E. Gardeniers, M. Elwenspoek, J.J.J. Kelly, Electrochim. Acta 42, 3367–3373 (1997)CrossRefGoogle Scholar
  14. C.R. Neagu, H. Jansen, H. Gardeniers, M. Elwenspoek, Mechatronics 10, 571–581 (2000)CrossRefGoogle Scholar
  15. F. Patolsky, G.Z., C.M. Lieber, Nat. Protocols. 1, 1711–1724 (2006)Google Scholar
  16. D.R. Reyes, D. Iossifidis, P.A. Auroux, A. Manz, Anal. Chem. 74, 2623–2636 (2002)CrossRefGoogle Scholar
  17. S. Tuomikoski, S. Franssila, Sensor. Actuat. A-Phys. 120, 408–415 (2005)CrossRefGoogle Scholar
  18. J. Xie, Y.N. Miao, J. Shih, Q. He, Y.C. Tai, T.D. Lee, Anal. Chem. 76, 3756–3763 (2004)CrossRefGoogle Scholar
  19. J. Xie, Y.N. Miao, J. Shih, Y.C. Tai, T.D. Lee, Anal. Chem. 77, 6947–6953 (2005)CrossRefGoogle Scholar
  20. Y.N. Yang, C. Li, J. Kameoka, K.H. Lee, H.G. Craighead, Lab Chip 5, 869–876 (2005a)CrossRefGoogle Scholar
  21. Y.N. Yang, C. Li, K.H. Lee, H.G. Craighead, Electrophoresis. 26, 3622–3630 (2005b)CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Seung-min Park
    • 1
  • Kelvin H. Lee
    • 2
  • Harold G. Craighead
    • 1
    Email author
  1. 1.School of Applied and Engineering PhysicsCornell UniversityIthacaUSA
  2. 2.Department of Chemical EngineeringUniversity of DelawareNewarkUSA

Personalised recommendations