Biomedical Microdevices

, Volume 9, Issue 6, pp 809–814

Effects of biomedical sterilization processes on performance characteristics of MEMS pressure sensors

  • L. A. Ferrara
  • A. J. Fleischman
  • J. L. Dunning
  • C. A. Zorman
  • S. Roy
Article

DOI: 10.1007/s10544-007-9093-z

Cite this article as:
Ferrara, L.A., Fleischman, A.J., Dunning, J.L. et al. Biomed Microdevices (2007) 9: 809. doi:10.1007/s10544-007-9093-z

Abstract

The effects of steam and gamma sterilization on the performance of bulk-micromachined pressure sensors were investigated using a variable pressure setup. Commercially available piezoresistive MEMS (microelectromechanical systems) pressure sensor die were characterized prior and subsequent to sterilization over a 0–500 Torr pressure range. The effects of sterilization were examined as changes in sensor output voltage (ΔV) at various applied pressures. For steam sterilization, ΔV decreased with applied pressure ranging from +0.27 mV at 100 Torr to −0.14 mV at 500 Torr. In contrast, the corresponding values for gamma-sterilized sensors were lower, decreasing from +0.01 mV 100 Torr to −0.06 mV at 500 Torr. The increased variation in ΔV for the steam-sterilized sensors was attributed to the formation of an oxide film, which was confirmed using energy dispersive X-ray (EDX) spectroscopy. Statistical analysis revealed that the effect of both sterilization procedures on sensor performance was insignificant.

Keywords

Sterilization MEMS Pressure sensor Gamma irradiation Biocompatibility Disinfection Silicon 

Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  • L. A. Ferrara
    • 1
  • A. J. Fleischman
    • 2
  • J. L. Dunning
    • 3
  • C. A. Zorman
    • 3
  • S. Roy
    • 2
  1. 1.Spine Research LaboratoryCleveland Clinic Spine Institute, The Cleveland ClinicClevelandUSA
  2. 2.BioMEMS Laboratory, Department of Biomedical Engineering (ND20)Lerner Research Institute, The Cleveland ClinicClevelandUSA
  3. 3.MEMS Laboratory, Department of Electrical Engineering and Computer ScienceCase Western Reserve UniversityClevelandUSA

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